A 2-D modeling of Metal-Oxide-Polycrystalline Silicon-Silicon (MOPS) structures for the determination of interface state and grain boundary state distributions
The aim of this work is the study of the Metal-Oxide-Polycrystalline Silicon-Silicon (MOPS) structure. This study is carried out by means of the two-dimension numerical resolution of Poisson’s equation with a model of state continuum in the bandgap and at the Si/SiO2 interface. By fitting experimental C(V) data with computed results, both grain boundary state and interface state distributions are determined.
KeywordsValence Band Edge Band Tail Polysilicon Layer Trap Distribution Band Tail State
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