Design of Microsystems: Systems-theoretical Aspects
Advances in Microelectronic technology, especially sensor- and actuator technology, have resulted in the development of integrated circuits which, in addition to microelectronics and transducers, contain mechanical and optical components. Consequently it has become possible to develop complex systems by coupling these new components with conventional microelectronic components and systems. The construction of these systems necessitates changes in the design and manufacturing process. This paper concentrates on the changes necessary, especially in the design process, to meet the challenges of this new field of microsystems (i.e., microelectromechanical systems, micromechatronics).
KeywordsFinite State Machine Homomorphic Image Congruence Relation Differential Equation System Mathematical System Theory
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