Manufacturing Methods and Material Systems
So far we have looked at the physics of single-electronics, at possible applications, and at methods to analyze them. What is missing is how to fabricate them. This final piece is a very important one, if not the most important one, for a successful single-electron technology. It means that most likely new and uncommon materials will have to be introduced and new processes have to be made reliable, reproducible, and economical. The following gives an overview of fabrication methods and material systems for single-electron devices. At this point no single method can be said to be ready for mass fabrication or can be considered superior to any other method. A compatibility with CMOS processes is desirable to allow mixing of CMOS and single-electronics.
KeywordsTunnel Junction Tunnel Resistance Optical Lithography Granular Film Lower Barrier Height
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