Green’s Function Approach for Three-Dimensional Diffusion Simulation of Industrial High Voltage Applications
In todays high voltage processes the optimization of process and layout design is a key point to get competitive products. Effects like punch-through between two junctions and breakdown near the surface of the wells make it necessary to analyze complex three-dimensional process steps by simulators which give accurate answers to the process engineers.
KeywordsSpace Charge Region Layout Design PMOS Transistor Semiconductor Process Spherical Diffusion
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