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Green’s Function Approach for Three-Dimensional Diffusion Simulation of Industrial High Voltage Applications

  • J. Cervenka
  • M. Knaipp
  • A. Hössinger
  • S. Selberherr
Conference paper

Abstract

In todays high voltage processes the optimization of process and layout design is a key point to get competitive products. Effects like punch-through between two junctions and breakdown near the surface of the wells make it necessary to analyze complex three-dimensional process steps by simulators which give accurate answers to the process engineers.

Keywords

Space Charge Region Layout Design PMOS Transistor Semiconductor Process Spherical Diffusion 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. [1]
    A. Hössinger, S. Selberherr, M. Kimura, I. Nomachi, and S. Kusanagi, “Three-Dimensional Monte-Carlo Ion Implantation Simulation for Molecular Ions,” in Electrochemical Society Proceedings, vol. 99–2, pp. 18–25, 1999.Google Scholar
  2. [2]
    M. Radi, E. Leitner, E. Hollensteiner, and S. Selberherr, “Analytical Partial Differential Equation Modeling Using AMIGOS,” in Proc. LASTED International Conference Artificial Intelligence and Soft Computing, (Banff, Canada), pp. 423–426, July 1997.Google Scholar
  3. [3]
    P. Fleischmann, R. Sabelka, A. Stach, R. Strasser, and S. Selberherr, “Grid Generation for Three-Dimensional Process and Device Simulation,” in Simulation of Semiconductor Processes and Devices, (Tokyo, Japan), pp. 161–166, Business Center for Academic Societies Japan, 1996.Google Scholar
  4. [4]
    H. Dirschmid, Einführung in die mathematischen Methoden der theoretischen Physik. Vieweg, 1976.Google Scholar

Copyright information

© Springer-Verlag Wien 2001

Authors and Affiliations

  • J. Cervenka
    • 1
  • M. Knaipp
    • 1
    • 2
  • A. Hössinger
    • 1
  • S. Selberherr
    • 1
  1. 1.Institute for MicroelectronicsTU ViennaViennaAustria
  2. 2.Austria Mikro Systeme International AGVienna

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