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A Shared Architecture for a Dynamic TechnologySimulation Repository

  • Michael G. Khazhinsky
  • Alexander Hoefler
  • Michael Stockinger
  • David J. Collins
  • Iuval Clejan
  • Karl Wimmer
  • William Taylor
  • Mark Foisy
  • J. M. Higman
  • Lars Bomholt
  • Christian Clémençon
  • Olga Zuyakova
  • Wolfgang Fichtner
Conference paper

Abstract

In this paper, the design of a shared technology simulation repository is described. This system allows the download, archival, and simultaneous translation of equipment recipe and run data into a shared, revision controlled repository, as well as the automated generation of Technology Computer Aided Design (TCAD) input. Based on this system Computer Integrated Manufacturing (CIM) data and integrated circuit layout data can be combined to provide rapid technology optimization, enabling new methods of technology development.

Keywords

Assembly Tool Manufacture Execution System Computer Integrate Manufacture Semiconductor Process System Computer Integrate Manufacture 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Wien 2001

Authors and Affiliations

  • Michael G. Khazhinsky
    • 1
    • 1
  • Alexander Hoefler
    • 1
  • Michael Stockinger
    • 1
  • David J. Collins
    • 1
  • Iuval Clejan
    • 1
  • Karl Wimmer
    • 1
  • William Taylor
    • 1
  • Mark Foisy
    • 1
  • J. M. Higman
    • 1
  • Lars Bomholt
    • 2
  • Christian Clémençon
    • 2
  • Olga Zuyakova
    • 2
  • Wolfgang Fichtner
    • 2
  1. 1.Motorola, Inc6501 William Cannon DriveAustinUSA
  2. 2.ISE Integrated Systems Engineering AGZurichSwitzerland

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