System Level Modeling of an Electrostatic Torsional Actuator
We present an efficient methodology for setting up MEMS macromodels which are based on a physical device description and lead to tractable mathematical relations for the device operation. Since design and technology parameters are input parameters of the resulting model, our approach is in particular suited for design studies. In addition to the reduction in degrees of freedom and, hence, the reduced simulation time, macromodels can easily be coupled with the electronic circuitry and the entire device can be simulated on system level. The methodology is demonstrated with reference to an electrostatic torsional actuator.
KeywordsCharge Pump System Level Modeling Mechanical Torque Reduce Simulation Time Micromirror Array
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