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System Level Modeling of an Electrostatic Torsional Actuator

  • Robert Sattler
  • Gerhard Wachutka
  • Florian Plötz
  • Sebastian Hoffmann

Abstract

We present an efficient methodology for setting up MEMS macromodels which are based on a physical device description and lead to tractable mathematical relations for the device operation. Since design and technology parameters are input parameters of the resulting model, our approach is in particular suited for design studies. In addition to the reduction in degrees of freedom and, hence, the reduced simulation time, macromodels can easily be coupled with the electronic circuitry and the entire device can be simulated on system level. The methodology is demonstrated with reference to an electrostatic torsional actuator.

Keywords

Charge Pump System Level Modeling Mechanical Torque Reduce Simulation Time Micromirror Array 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    G. Wachutka, “Tailored modeling: a way to the `virtual transducer fab”’, Sensors and Actuators, vol. A46–47, pp. 46–47, 1995.Google Scholar
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    F. Plötz, S. Michaelis, R. Aigner, H.—J. Timme, J. Binder, R. No¨¦, “A Low—Voltage Torsional Actuator for Application in RF—Microswitches”, Proc. Eurosensors XIV, August 2000, Copenhagen, Denmark, pp. 297–300.Google Scholar
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    R. Sattler, F. Plötz, G. Wachutka, “Macromodeling of an Electrostatic Torsional Actuator”, Proc. Transducers ’01, June 2001, Munich, Germany, in press.Google Scholar

Copyright information

© Springer-Verlag Wien 2001

Authors and Affiliations

  • Robert Sattler
    • 1
  • Gerhard Wachutka
    • 1
  • Florian Plötz
    • 2
  • Sebastian Hoffmann
    • 3
  1. 1.Institute for Physics of ElectrotechnologyMunich University of TechnologyMunichGermnay
  2. 2.Infineon Technologies AGMunichGermany
  3. 3.Optical Communications and High Frequency EngineeringPaderbornGermany

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