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Acceleration of Lattice Monte Carlo Simulations and Application to Diffusion/Clustering of As at High Concentrations

  • Scott T. Dunham
  • Zudian Qin

Abstract

Kinetic lattice Monte Carlo (KLMC) simulations enable practical atomic-scale modeling of device fabrication processes. In this paper, we discuss implementation of an acceleration algorithm which can provide orders of magnitude speed-up. We apply the result to diffusion and clustering of As at very high doping levels, which are critically important in the formation of ultrashallow junctions.

Keywords

High Doping Level Acceleration Algorithm Device Fabrication Process Strong Binding Energy Exchange Betwen 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Wien 2001

Authors and Affiliations

  • Scott T. Dunham
    • 1
  • Zudian Qin
    • 1
  1. 1.Department of Electrical EngineeringUniversity of Washington Seattle

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