Acceleration of Lattice Monte Carlo Simulations and Application to Diffusion/Clustering of As at High Concentrations

  • Scott T. Dunham
  • Zudian Qin
Conference paper


Kinetic lattice Monte Carlo (KLMC) simulations enable practical atomic-scale modeling of device fabrication processes. In this paper, we discuss implementation of an acceleration algorithm which can provide orders of magnitude speed-up. We apply the result to diffusion and clustering of As at very high doping levels, which are critically important in the formation of ultrashallow junctions.


High Doping Level Acceleration Algorithm Device Fabrication Process Strong Binding Energy Exchange Betwen 


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Copyright information

© Springer-Verlag Wien 2001

Authors and Affiliations

  • Scott T. Dunham
    • 1
  • Zudian Qin
    • 1
  1. 1.Department of Electrical EngineeringUniversity of Washington Seattle

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