Abstract
The aim of this paper is to discuss an ideal design procedure for biologically-inspired mechano-sensors. The main steps of this procedure are the following: (1) analysis of force and position sensors in humans; (2) analysis of technologies available for MEMS (Micro Electro Mechanical Systems) and (3) design and implementation of biologically-inspired sensors in innovative mechatronic and biomechatronic systems (e.g., anthropomorphic robots, prostheses, and neuroprostheses).
According to this sequence, the first part of the paper is dedicated to the presentation of some features of force and motion sensors in humans. Then, technologies for fabricating miniaturized force and motion sensors (and some examples of such sensors) are briefly presented. Finally, some applications of biologically-inspired systems developed by the authors to sense force and position in anthropomorphic robots and in prosthetics are illustrated and discussed.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Bailey SA, Cham JG, Cutkosky MR, Full RJ (2000) Biomimetic robotic mechanisms via shape deposition manufacturing. In: Hollerbach J, Koditschek D (eds) Robotics Research: the Ninth International Symposium, Springer-Verlag, London
Bove M, Grattarola M, Verreschi G (1997) In vitro 2-D networks of neurons characterized by processing the signals recorded with a planar microtransducer array. IEEE Trans Biomedical Eng 44: 964–977
Brooks RA (1997) The cog project. Advanced Robotics 15(7): 968–970
Brooks RA (2000) Cambrian Intelligence. MIT Press, Cambridge
Brooks RA, Stein LA (1994) Building brains for bodies. Autonomous Robots 1: 7–25
Caiti A, Canepa G, De Rossi D, Germagnoli F, Maganes G, Parisini T (1995) Towards the realization of an artificial tactile system: fine-form discrimination by a tensorial tactile sensor array and neural inversion algorithms. IEEE Transaction on System, Man and Cybernetics 25: 933–946
Carrozza MC, Dario P, Lazzarini R, Massa B, Zecca M, Roccella S, Sacchetti R (2000) An actuating system for a novel biomechatronic prosthetic hand. Actuator 2000: 19–21 June 2000, Bremen
Carrozza MC, Massa B, Dario P, Lazzarini R, Zecca M, Micera S, Pastacaldi P (2002) A Two-DOF finger for a biomechatronic artificial hand. Technology and Healthcare, 10: 77–89
Dario P, Carrozza MC, Allotta B, Guglielmelli E (1996) Micromechatronics in Medicine. IEEE/ASME Trans on Mechatronics 1: 137–148
Dario P, De Rossi D, Domenici C, Francesconi R (1984) Ferroelectric polymer tactile sensors with anthropomorphic features. In: IEEE Int Conf Rob, pp 332–340
Dario P, Fukuda T (1998) Guest editorial, IEEE/ASME Transaction on Mechatronics 3: 1–2
Dario P, Garzella P, Toro M, Micera S, Alavi M, Meyer J-U, Valderrama E, Sebastiani L, Ghelarducci B, Mazzoni C, Pastacaldi P (1998a) Neural interfaces for regenerated nerve stimulation and recording. IEEE Transactions on Rehabilitation Engineering 6: 353–363
Dario P, Laschi C, Guglielmelli E (1998b) Sensors and actuators for ’humanoid’ robots. Advanced Robotics, Special Issue on Humanoid 11(6): 567–584
Dario P, Lazzarini R, Magni R (1996) An integrated miniature fingertip sensor. Machine Human Science, Nagoya, pp 91–97
Dario P, Sandini G, Abisher P (eds) (1989) Robots and Biological Systems: Towards a New Bionics?, NATO ASI Series
De Rossi D, Ahluwalia A (2000) Biomimetics: new tools for an old myth. In: 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, October 12–14, 2000, Lyon, France, pp 15–17
Despont M (1992) A comparative study of bearing designs and operational environments for harmonic side-drive micromotors. In: proceedings of MEMS 92: 171–176
Fatikow S, Rembold U (1997) Microsystem Technology. Springer-Verlag, Berlin Heidelberg New York
Ferrari M (1999) Editorial, Journal of Biomedical Microdevices 1: 97–98
Fischer K (1991) Mikromechanik und Mikroelektronik vereint mit Optik. Technische Rundschau 106–108
Freschi C, Vecchi F, Micera S, Sabatini AM, Dario P (2000) Force control during grasp using FES techniques: preliminary results. 5th Annual Conference of the International Functional Electrical Stimulation Society (IFESS 2000), 17–24 June 2000, Aalborg
Fujimasa I (1996) Micromachines, a New Era in Mechanical Engineering. Oxford University Press, Oxford
Fujita M (1999) AIBO: Towards the era of digital creatures. In: International Symposium on Robotics Research, Snowbird UH, October 9–12, pp 257–262
Fukuda T, Menz W (1998) Handbook of Sensors and Actuators. Micro Mechanical Systems. Elsevier Science, Amsterdam
GRIP Esprit LTR Project #26322 An integrated system for the neuroelectric control of grasp in disabled persons
Harsanyi G (1995) Polymer Films in Sensor Applications. Technomic Publishing Co., Basel
Hashimoto S (2000) Humanoid robots in Waseda University — Hadaly-2 and Wabian. In: First IEEE-RAS International Conference on Humanoid Robots — Humanoids 2000, Cambridge, MA, September 7–8
Heuberger A (1991) Mikromechanik: Mikrofertigung mit Methoden der Halbleitertechnologie. Springer-Verlag, Berlin Heidelberg New York
Heuschkel MO, Guerin L, Buisson B, Bertrand D, Renaud P (1998) Buried microchannels in photopolymer for delivering of solutions to neurons in a network. Sensors and Actuators B48: 356–361
Hirose H (1993) Biologically Inspired Robots (Snake-like Locomotor and Manipulator). Oxford University Press, Oxford
Howe RD, Cutkosky MR (1992) Touch Sensing for Manipulation and Recognition. In: Kathib O, Craig J, Lozano-Pérez T (eds) The Robotics Review 2: 55–112, MIT Press, Cambridge Masshttp://csmt.jpl.nasa.gov/csmtpages/Technologies/mgyro/mgyro.html
Inoue H (2000) HRP: Humanoid Robotics Project of MITI. In: First IEEE-RAS International Conference on Humanoid Robots — Humanoids 2000, Cambridge Mass, September 7–8
INTER Project promoted by the European Commission (“Intelligent Neural Interface” Esprit Basic Research Project #8897)
Johnson MW, Peckham PH, Bhadra N, Kilgore KL, Gazdik MM, Keith MW, Strojnik P (1999) Implantable transducer for two-degree-of-freedom joint angle sensing“. IEEE Trans Biomed Eng 7(3): 349–359
Kandel ER, Schwartz JH, Jessel TM (1991) Principles of Neural Science, 3rd edition. Elsevier Science, New York
Langer R, Vacanti J (1993) Tissue engineering. Science 260: 920–926
Lazzarini R, Magni R, Dario P (1995) A tactile array sensor layered in an artificial skin. In: Proceedings of the 1995 IEEE/RSJ International Conference on Intelligent Robots and Systems, Iros ’95, 3: 114–119
Madou M (1997) Fundamentals of Microfabrication. CRC Press, Boca Raton, New York
Mannion P (1999) Integration and Inductive Sensing Combine to Improve Automotive/Industrial Sensing. Electronic Design
Mehlhorn T (1992) CMOS-compatible capacitive silicon pressure sensors. Micro System Technologies 92: 277–285
Menzel P, D’Aluisio F, Mann CC (2000) RoboSapiens. MIT Press, Cambridge Mass
Muller RS, Howe RT, Senturia SD, Smith RL, White RM (1991) Microsensors, IEEE Press, New York
Najafi K, Wise KD, Mochizuki T (1985) A High-Yield IC- Compatible Multichannel Recording Array. IEEE Trans Electronic Devices ED-32: 1206–1211
Nicholls HR, Lee MH (1989) A survey of robot tactile sensing technology. Int J Robotics Research 8: 3–30
Nicholls HR, Lee MH (1999) Tactile sensing for mechatronics — a state of the art survey. Mechatronics 9: 1–32
Russel RA (1990) Robot Tactile Sensing. Prentice Hall Ltd, Australia
Schuettler M, Stieglitz T, Meyer J-U (1999) A multipolar precision hybrid cuff electrode for FES on large peripheral nerves. 21st Annual International Conference of the IEEE Engineering in Medicine and Biology Society, October 13–16, Atlanta, USA, 1999
Shibata T, Tanie K (1999) Creation of subjective value through physical interaction between human and machine. In: 4th International Symposium on Artificial Life and Robotics, January 19–22, Oita, Japan
Sinkjaer T, Haugland M, Struijk J, Riso RR (1999) Long-term cuff electrode recordings from peripheral nerves in animals and humans. In: Windhorst U, Johansson H (eds) Modern Techniques in Neuroscience Research. Springer-Verlag, New York Stanford University, http://www-cdr.stanford.edu
Tilmans H, Bouwstra S (1993) A novel design of a highly sensitive low differential-pressure sensor using built-in resonant strain gauges. J Micromech Microeng 3: 198–202
Vecchi F, Freschi C, Micera S, Sabatini AM, Dario P (2000) Experimental evaluation of two commercial force sensors for applications in biomechanics and motor control. 5th Annual Conference of the International Functional Electrical Stimulation Sociaty (IFESS 2000), June 17–24, 2000, Aalborg
Webster JG (1988) Tactile Sensors for Robotics and Medicine. John Wiley & Sons, New York
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2003 Springer-Verlag Wien
About this chapter
Cite this chapter
Dario, P. et al. (2003). Biologically-Inspired Microfabricated Force and Position Mechano-Sensors. In: Barth, F.G., Humphrey, J.A.C., Secomb, T.W. (eds) Sensors and Sensing in Biology and Engineering. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6025-1_8
Download citation
DOI: https://doi.org/10.1007/978-3-7091-6025-1_8
Publisher Name: Springer, Vienna
Print ISBN: 978-3-7091-7287-2
Online ISBN: 978-3-7091-6025-1
eBook Packages: Springer Book Archive