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Sputtering by Ions with 10–65 keV Energy

  • O. Almén
  • G. Bruce
Conference paper

Abstract

The sputtering experiments described in this paper were made with the 90° electromagnetic isotope separator in our laboratory [1].

Keywords

Mass Number High Current Density Target Material Target Atom Thick Oxide Layer 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    Almén, O., G. Bruce, and A. Lundén, Nuclear Instruments 2, 249 (1958).CrossRefGoogle Scholar
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    Brewer, L., in: Chemistry and Metallurgy of Miscellaneous Materials Nat. Nucl. Energy Series Div. IV. vol. 19 B, p. 13.Google Scholar
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    Thermodynamic Properties of Metals and Alloys, Min. Res. Lab. University of California.Google Scholar
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    Smith, M. L., Proc. 1955 Harwell Isotope Conf., Chapter 7.Google Scholar
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    Yonts, O. C., and al., J. Appl. Phys. 31, 447 (1960).ADSCrossRefGoogle Scholar

Copyright information

© Springer-Verlag in Vienna 1961

Authors and Affiliations

  • O. Almén
    • 1
  • G. Bruce
    • 1
  1. 1.Department of PhysicsChalmers University of TechnologyGothenburgSweden

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