Sputtering by Ions with 10–65 keV Energy

  • O. Almén
  • G. Bruce
Conference paper


The sputtering experiments described in this paper were made with the 90° electromagnetic isotope separator in our laboratory [1].


Mass Number High Current Density Target Material Target Atom Thick Oxide Layer 
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Copyright information

© Springer-Verlag in Vienna 1961

Authors and Affiliations

  • O. Almén
    • 1
  • G. Bruce
    • 1
  1. 1.Department of PhysicsChalmers University of TechnologyGothenburgSweden

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