Sputtering Experiments with the Amsterdam Electromagnetic Isotope Separator

  • P. K. Rol
  • J. M. Fluit
  • J. Kistemaker
Conference paper


The sputtering ratio of polycrystalline copper is measured by bombarding with ions of many elements as a function of the ion energy and the angle of incidence. For copper monocrystals the sputtering ratio has been measured for different crystal orientations as a function of the angle of incidence in bombardment with Ar+-ions at 20 keV. An interpretation of the measurements is given on the basis of rigid sphere collisions of the ions in the lattice. It is supposed that excited regions, which emit the sputtered particles, are formed near the surface.


Angular Distribution Free Path Target Material Oblique Incidence Target Atom 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    Rol, P. K., J. M. Fluit, and J. Kistemaker, Terzo Congr. Int. sui Fenomeni d’lonizzazione nei Gas. Soc. It. di Fis., p. 872 (1957).Google Scholar
  2. 2.
    Rol, P. K., Thesis, Amsterdam 1960.Google Scholar
  3. 3.
    Seeliger, R., and K. Sommermeyer, Z. Physik 93, 692 (1935).ADSCrossRefGoogle Scholar
  4. 4.
    Wehner, G. K., J. Appl. Phys. 26, 1056 (1955).ADSCrossRefGoogle Scholar
  5. 5.
    Yurasova, V. E., N. V. Pleshivtsev, and I. V. Orfanov, J.E.T.P. 37, 689 (1960).Google Scholar
  6. 6.
    Bohr, N., Kgl. Danske Videnskab. Selskab. Biol. Medd. 18, No. 8 (1948).Google Scholar
  7. 7.
    Rol, P. K., J. M. Fluit, F. P. Viehböck, and M. de Jong, Ionization Phenomena in Gases, Edited by N. R. Nilsson, North-Holland Publ. Co., p. 257 (Amsterdam 1960).Google Scholar
  8. 1.
    O’Briain, C. D., c.s. J. Chem. Phys. 29. 3. 1958.ADSCrossRefGoogle Scholar
  9. 2.
    Cobíc, B., c.s. Ionisation Phenomena in Gases, Ed. by N. R. Nilsson, North Holland Publ. Co., p. 260 (Amsterdam 1960).Google Scholar
  10. 3.
    Wehner, G. K., Adv. in Electr., Ed. by L. Marton, VoL. VII. Acad. Press, p. 239 (New York 1955).Google Scholar

Copyright information

© Springer-Verlag in Vienna 1961

Authors and Affiliations

  • P. K. Rol
    • 1
  • J. M. Fluit
    • 1
  • J. Kistemaker
    • 1
  1. 1.F.O.M.-Laboratorium voor MassaspectrografieAmsterdamThe Netherlands

Personalised recommendations