New Developments in Spatially Multidimensional Ion Microprobe Analysis
Due to the combination of lateral imaging properties, localized ion emission and controlled removal of surface layers, ion microprobe mass spectrometry inherently is capable of spatially 3-dimensional constitutional solids analysis. Attempts to utilize this capability have been reported in the literature1, 2. However, only the computerization of microprobe operation and the developments in on-line storage of a large number of digitized ion micrographs, together with the developments of digital image processing and display algorithms, made 3-dimensional distribution analysis a feasible mode of solids characterization.
KeywordsDepth Profile Sandwich Sample Control Removal Mass Cycle Total Sputtering Yield
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