Advertisement

New Developments in Spatially Multidimensional Ion Microprobe Analysis

  • W. Steiger
  • F. G. Rüdenauer
  • H. Gnaser
  • P. Pollinger
  • H. Studnicka
Part of the Mikrochimica Acta book series (MIKROCHIMICA, volume 10)

Abstract

Due to the combination of lateral imaging properties, localized ion emission and controlled removal of surface layers, ion microprobe mass spectrometry inherently is capable of spatially 3-dimensional constitutional solids analysis. Attempts to utilize this capability have been reported in the literature1, 2. However, only the computerization of microprobe operation and the developments in on-line storage of a large number of digitized ion micrographs, together with the developments of digital image processing and display algorithms, made 3-dimensional distribution analysis a feasible mode of solids characterization.

Keywords

Depth Profile Sandwich Sample Control Removal Mass Cycle Total Sputtering Yield 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    E. Berkey, in Microstructural Analysis, J. L. McCall and W. M. Mueller (eds.). New York: Plenum Press. 1973.Google Scholar
  2. 2.
    H.W. Werner, Acta Electron. 19, 56 (1976).Google Scholar
  3. 3.
    D. M. Drummer and G. H. Morrison, Analyt. Chemistry 52, 2147 (1980).CrossRefGoogle Scholar
  4. 4.
    H. Gnaser, F. G. Rüdenauer, H. Studnicka, and P. Pollinger in Proc. 29th Int. Field Emission Symposion. Gothenburg 1982, in print.Google Scholar
  5. 5.
    R.L. Seliger, R.L. Kubena, R.D. Olney, J.W. Ward, and V. Wang, J. Vac. Sci. Tech. 16, 1610 (1979).CrossRefGoogle Scholar
  6. 6.
    F.G. Rüdenauer and W. Steiger, Mikrochim. Acta [Wien] 1981 II, 375.Google Scholar
  7. 7.
    F.G. Rüdenauer, P. Pollinger, H. Studnicka, H. Gnaser, W. Steiger, and M.J. Higatsberger, in Secondary Ion Mass Spectrometry, SIMS III, A. Benninghoven, J. Giber, J. Laszlo, M. Riedel, and H.W. Werner (eds.). Berlin-Heidelberg-New York: Springer-Verlag. 1982.Google Scholar
  8. 8.
    A. Waugh, in Proc. 29th Int. Field Emission Symposion. Gothenburg 1982, in print.Google Scholar
  9. 9.
    A J. Patkin and G.H. Morrison, Analyt. Chemistry 54, 2 (1982).CrossRefGoogle Scholar
  10. 10.
    F. Schulz and K. Wittmaack, Rad. Eff. 29, 31 (1976).CrossRefGoogle Scholar
  11. 11.
    P. Braun, unpublished results (1982).Google Scholar

Copyright information

© Springer-Verlag Wien 1983

Authors and Affiliations

  • W. Steiger
    • 1
  • F. G. Rüdenauer
    • 1
    • 2
  • H. Gnaser
    • 1
  • P. Pollinger
    • 1
  • H. Studnicka
    • 1
  1. 1.Österreichisches Forschungszentrum Seibersdorf and Institut für ExperimentalphysikUniversität WienAustria
  2. 2.Österreichisches Forschungszentrum SeibersdorfWienAustria

Personalised recommendations