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Quantitative Surface Analysis of CVD-Hard Material Coatings with SIMS

  • Gerhard Stingeder
  • M. Grasserbauer
  • H. M. Ortner
  • W. Schintlmeister
  • W. Wallgram
Part of the Mikrochimica Acta book series (MIKROCHIMICA, volume 10)

Abstract

Protective coatings of hard materials are used on hard-metal (WC-Co) tools for improvement of wear resistance1. In a further development program, the properties of Al-B-mixed oxide and Ti(C, N, O) have been investigated with respect to wear resistance for cast iron machining and high speed cutting.

Keywords

Depth Profile Detection Power Wear Resistant Coating High Lateral Resolution Theoretical Detection Limit 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    W. Schintlmeister, O. Pacher, W. Wallgram, and J. Kanz, Metall 34, 905 (1980).Google Scholar
  2. 2.
    F.G. Rüdenauer, Instrumental Aspects of Spatially 3-Dimensional SIMS-Analysis, in: Secondary Ion Mass Spectrometry II. A. Benninghoven, J. Giber, J. Laszlo, M. Riedel, and H. W. Werner (eds.). Berlin-Heidelberg-New York: Springer-Verlag. 1982.Google Scholar
  3. 3.
    E. Zinner, private communication.Google Scholar
  4. 4.
    H.W. Werner, Mikrochim. Acta [Wien], Suppl. VII, 1977, 63.Google Scholar
  5. 5.
    E. Zinner, Electrochem. Soc., in press.Google Scholar

Copyright information

© Springer-Verlag Wien 1983

Authors and Affiliations

  • Gerhard Stingeder
    • 1
    • 2
  • M. Grasserbauer
    • 1
  • H. M. Ortner
    • 1
  • W. Schintlmeister
    • 1
  • W. Wallgram
    • 1
  1. 1.Institut für Analytische ChemieTechnischen Universität Wien and Metallwerk Plansee Ges.m.b.H.ReutteAustria
  2. 2.Institut für Analytische ChemieTechnische Universität WienWienAustria

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