Surface Analysis of Metals with SIMS

  • M. Pimminger
  • M. Grasserbauer
Part of the Mikrochimica Acta book series (MIKROCHIMICA, volume 10)


Many properties of materials are strongly influenced by the surface state. Therefore a good analytical characterization of the surface layer could give support both for a direct improvement of technological processes and for tracing of fault sources, when failures in production are occurring.


Depth Profile Thin Surface Film Contamination Layer Double Focus Mass Spectrometer Spherulitic Graphite 
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  1. 1.
    A. Benninghoven, Surf. Sci. 28, 541 (1971).CrossRefGoogle Scholar
  2. 2.
    F. Degreve and Ph. Ged, subm. to Surf. and Interf. Anal.Google Scholar
  3. 3.
    C.A. Evans and R.J. Blattner, Ann. Rev. Mater. Sci. 8, 181 (1978).CrossRefGoogle Scholar
  4. 4.
    D.H. Everett, Pure and Appl. Chem. 31, 579 (1972).CrossRefGoogle Scholar
  5. 5.
    B. Lux, Gießereiforsch. 22, 65 (1970).Google Scholar
  6. 6.
    B. Lux, Gießereiforsch. 22, 161 (1970).Google Scholar
  7. 7.
    H. Oechsner, Secondary Ion Mass Spectrometry SIMS III, A. Benninghoven, J. Giber, J. Laszlo, M. Riedel, and H. W. Werner (eds.). Berlin-Heidelberg-New York: Springer-Verlag. 1982. p. 106.CrossRefGoogle Scholar
  8. 8.
    H.W. Werner, Vacuum 24, 493 (1974).CrossRefGoogle Scholar
  9. 9.
    H.W. Werner, Appl. Phys. 7, 65 (1975).CrossRefGoogle Scholar
  10. 10.
    H.W. Werner, Acta Electronica 18, 51 (1975).Google Scholar
  11. 11.
    E. Zinner, subm. to J. of Electrochem. Soc.Google Scholar

Copyright information

© Springer-Verlag Wien 1983

Authors and Affiliations

  • M. Pimminger
    • 1
  • M. Grasserbauer
    • 1
  1. 1.Institut für Analytische ChemieTechnische Universität WienWienAustria

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