Abstract
For the chemical analysis of a solid sample a number of physical methods have been developed besides the classical, mostly time consuming methods of wet chemistry. Such analytical techniques are e.g. the optical emission and absorption spectroscopy or X-ray fluorescence, but also more recent techniques as X-ray Photoelectron Spectroscopy (XPS), Auger Electron Spectroscopy (AES), Secondary Ion Mass Spectroscopy (SIMS), Ion Scattering Spectroscopy (ISS) and others. This second group of analytical methods is of particular interest because of the possibility to determine the chemical composition at the very surface of the sample, and to obtain concentration depth profiles when the sample material is removed by sputtering.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
H. Oechsner, Appl. Phys. 8, 185 (1975).
H. Oechsner and W. Gerhard, Phys. Letters 40A, 211 (1972).
H. Oechsner, Plasma Physics 16, 835 (1974).
H. Oechsner, W. Rühe, and E. Stumpe, Surf. Sci. 85, 289 (1979).
H. Oechsner and A. Wucher, Appl. Surf. Sci. 10, 342 (1982).
H. Oechsner and E. Stumpe, Appl. Phys. 14, 43 (1977).
E. Stumpe, H. Oechsner, and H. Schoof, Appl. Phys. 20, 55 (1979).
H. Oechsner, H. Schoof, and E. Stumpe, Surf. Sci. 76, 343 (1978).
H. Oechsner, Molecule Formation in Oxide Sputtering. In: Secondary Ion Mass Spectrometry SIMS III, A. Benninghoven et al. (eds.). Berlin-Heidelberg-New York: Springer-Verlag. 1982. p. 106.
H. Schoof and H. Oechsner, Proc. 4th ICSS Cannes 1980, Vol. II, p. 1291 (Suppl. 201 of LeVide, le Conches Minces).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1983 Springer-Verlag Wien
About this paper
Cite this paper
Müller, K.H., Oechsner, H. (1983). Quantitative Secondary Neutral Mass Spectrometry Analysis of Alloys and Oxide-Metal-Interfaces. In: Grasserbauer, M., Zacherl, M.K. (eds) Progress in Materials Analysis. Mikrochimica Acta, vol 10. Springer, Vienna. https://doi.org/10.1007/978-3-7091-3943-1_4
Download citation
DOI: https://doi.org/10.1007/978-3-7091-3943-1_4
Publisher Name: Springer, Vienna
Print ISBN: 978-3-211-81759-9
Online ISBN: 978-3-7091-3943-1
eBook Packages: Springer Book Archive