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Applications of SIMS in Interdisciplinary Materials Characterization

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Progress in Materials Analysis

Part of the book series: Mikrochimica Acta ((MIKROCHIMICA,volume 10))

Abstract

Although pioneering work on secondary ion mass spectrometry was performed already in the 1930-s, one may say that SIMS as a microstructural-microanalytical technique for materials research saw the light of day about 21 years ago1, 2. As a commercially available tool, SIMS is only some 14 years old3–6. Since about half that time, its typical assets, mechanisms and artifacts have been illuminated by extensive and thorough international discussion7, 8, and today SIMS is widely accepted as an off-age technique for very sensitive three-dimensional characterization of materials. Current trends9–11 are directed mainly towards perfected quantitation, towards efficient routines in daily applications, and towards apparative development for further improved detection sensitivity and spacial resolution.

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Authors and Affiliations

  1. Physics Department and SIMS-Laboratory, Chalmers University of Technology, Gothenburg, Sweden

    Alexander Lodding & Hans Odelius

Authors
  1. Alexander Lodding
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  2. Hans Odelius
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Editors and Affiliations

  1. Technical University of Vienna, Austria

    M. Grasserbauer (Chairman) (Chairman)

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© 1983 Springer-Verlag Wien

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Lodding, A., Odelius, H. (1983). Applications of SIMS in Interdisciplinary Materials Characterization. In: Grasserbauer, M., Zacherl, M.K. (eds) Progress in Materials Analysis. Mikrochimica Acta, vol 10. Springer, Vienna. https://doi.org/10.1007/978-3-7091-3943-1_3

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  • DOI: https://doi.org/10.1007/978-3-7091-3943-1_3

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-211-81759-9

  • Online ISBN: 978-3-7091-3943-1

  • eBook Packages: Springer Book Archive

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