Quantitative Electron Probe Microanalysis of Sputtered FeC Dry Lubrication Films
FeC-layers were prepared on various substrate materials (Si, SiO2, glass, steel) by radio frequency sputtering. Typical applications may be in the fields of dry lubrication and wear resistance coatings. Chemical analysis is essential for the discussion of sputtering parameters and friction coefficients. This requires also the determination of low concentrations of argon and oxygen, which are incorporated during the sputtering process.
KeywordsPeak Height Mass Absorption Coefficient Radio Frequency Sputtering Peak Height Measurement Increase Carbon Concentration
Unable to display preview. Download preview PDF.
- 2.J. Henoc, C. Conty, and M. Tong, Proceedings of the 14th MAS Conference. San Antonio, 1979, p. 281.Google Scholar
- 3.K.F.J. Heinrich, The Electron Microprobe. New York: Wiley. 1966.Google Scholar
- 4.W. Weisweiler, Mikrochim. Acta [Wien] 1970. 744.Google Scholar
- 7.J. Ruste, J. Microsc. Spectrosc. Electron. 4, 123 (1979).Google Scholar