Skip to main content
SpringerLink
Log in

Quantitative Electron Probe Microanalysis of Sputtered FeC Dry Lubrication Films

  • Conference paper
Progress in Materials Analysis

Part of the book series: Mikrochimica Acta ((MIKROCHIMICA,volume 10))

  • 160 Accesses

Abstract

FeC-layers were prepared on various substrate materials (Si, SiO2, glass, steel) by radio frequency sputtering. Typical applications may be in the fields of dry lubrication and wear resistance coatings. Chemical analysis is essential for the discussion of sputtering parameters and friction coefficients. This requires also the determination of low concentrations of argon and oxygen, which are incorporated during the sputtering process.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. P. Willich and D. Obertop, X-Ray Spectrom. 11, 32 (1982).

    Article  CAS  Google Scholar 

  2. J. Henoc, C. Conty, and M. Tong, Proceedings of the 14th MAS Conference. San Antonio, 1979, p. 281.

    Google Scholar 

  3. K.F.J. Heinrich, The Electron Microprobe. New York: Wiley. 1966.

    Google Scholar 

  4. W. Weisweiler, Mikrochim. Acta [Wien] 1970. 744.

    Google Scholar 

  5. B.L. Henke and E.S. Ebisu, Advances in X-Ray Analysis 17, 150 (1974).

    Article  CAS  Google Scholar 

  6. G. Love, M.G.C. Cox, and V.D. Scott, J. Phys. D: Appl. Phys. 7, 2131 (1974).

    Article  CAS  Google Scholar 

  7. J. Ruste, J. Microsc. Spectrosc. Electron. 4, 123 (1979).

    CAS  Google Scholar 

  8. G. Love and V.D. Scott, Scanning 4, 111 (1981).

    Article  CAS  Google Scholar 

  9. R.H. Packwood and J.D. Brown, X-Ray Spectrom. 10, 138 (1981).

    Article  CAS  Google Scholar 

  10. J.D. Brown and R.H. Packwood, X-Ray Spectrom. 11, 187 (1982).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Philips GmbH Forschungslaboratorium Hamburg, Vogt-Kölln-Strasse 30, D-2000, Hamburg 54, Federal Republic of Germany

    Dr. P. Willich

  2. Metaalinstituut TNO, Apeldoorn, The Netherlands

    A. P. von Rosenstiel & N. Drost

Authors
  1. Dr. P. Willich
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. P. von Rosenstiel
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. N. Drost
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Technical University of Vienna, Austria

    M. Grasserbauer (Chairman) (Chairman)

Rights and permissions

Reprints and permissions

Copyright information

© 1983 Springer-Verlag Wien

About this paper

Cite this paper

Willich, P., von Rosenstiel, A.P., Drost, N. (1983). Quantitative Electron Probe Microanalysis of Sputtered FeC Dry Lubrication Films. In: Grasserbauer, M., Zacherl, M.K. (eds) Progress in Materials Analysis. Mikrochimica Acta, vol 10. Springer, Vienna. https://doi.org/10.1007/978-3-7091-3943-1_17

Download citation

  • DOI: https://doi.org/10.1007/978-3-7091-3943-1_17

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-211-81759-9

  • Online ISBN: 978-3-7091-3943-1

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation