Quantitative Electron Probe Microanalysis of Sputtered FeC Dry Lubrication Films

  • P. Willich
  • A. P. von Rosenstiel
  • N. Drost
Part of the Mikrochimica Acta book series (MIKROCHIMICA, volume 10)


FeC-layers were prepared on various substrate materials (Si, SiO2, glass, steel) by radio frequency sputtering. Typical applications may be in the fields of dry lubrication and wear resistance coatings. Chemical analysis is essential for the discussion of sputtering parameters and friction coefficients. This requires also the determination of low concentrations of argon and oxygen, which are incorporated during the sputtering process.


Peak Height Mass Absorption Coefficient Radio Frequency Sputtering Peak Height Measurement Increase Carbon Concentration 
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Copyright information

© Springer-Verlag Wien 1983

Authors and Affiliations

  • P. Willich
    • 1
  • A. P. von Rosenstiel
    • 2
  • N. Drost
    • 2
  1. 1.Philips GmbH Forschungslaboratorium HamburgHamburg 54Federal Republic of Germany
  2. 2.Metaalinstituut TNOApeldoornThe Netherlands

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