Analysis of Reactively Ion Plated Titanium-Nitrid Films
Hard metal coatings on cutting tools — first applied to cemented carbide inserts — are presently finding new applications for high-speed-steel (HSS) tools such as twistdrills, end mills and hob cutters. While the original coating technique employed was Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD) processes1 are favored for HSS coatings. The main advantage of PVD lies in the lower process temperatures, well below the annealing temperature (~560 °C) of HSS, as compared to CVD (typically 1000 °C). The most widely used coating materials for tools employed to date are TiC, TiN, and A12O3, and multilayer combinations of these refractory compounds. In particular, pseudobinary alloys of type TiC x N y O1−;x−y are generally chosen for coatings on HSS tools.
KeywordsPhysical Vapor Deposition Auger Spectrum Auger Electron Spectrum Hard Metal Coating Pseudo Binary Alloy
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