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Analysis of Reactively Ion Plated Titanium-Nitrid Films

  • S. Laimer
  • P. Braun
  • H. Störi
  • F. Viehböck
  • P. Rödhammer
  • K. Kailer
Part of the Mikrochimica Acta book series (MIKROCHIMICA, volume 10)

Abstract

Hard metal coatings on cutting tools — first applied to cemented carbide inserts — are presently finding new applications for high-speed-steel (HSS) tools such as twistdrills, end mills and hob cutters. While the original coating technique employed was Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD) processes1 are favored for HSS coatings. The main advantage of PVD lies in the lower process temperatures, well below the annealing temperature (~560 °C) of HSS, as compared to CVD (typically 1000 °C). The most widely used coating materials for tools employed to date are TiC, TiN, and A12O3, and multilayer combinations of these refractory compounds. In particular, pseudobinary alloys of type TiC x N y O1−;xy are generally chosen for coatings on HSS tools.

Keywords

Physical Vapor Deposition Auger Spectrum Auger Electron Spectrum Hard Metal Coating Pseudo Binary Alloy 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    D.G. Teer, in Proc. Conf. Ion Plating and Allied Techniques, Edinburgh 1977, p. 13.Google Scholar
  2. 2.
    L.E. Toth, Transition Metal Carbides and Nitrides. New York: Academic Press. 1971.Google Scholar
  3. 3.
    S. Laimer, Master Thesis, Technische Universität, Vienna, Austria, 1982.Google Scholar
  4. 4.
    J.-E. Sundgren, Thesis, Linköping Inst. of Technology, Linköping, 1982.Google Scholar

Copyright information

© Springer-Verlag Wien 1983

Authors and Affiliations

  • S. Laimer
    • 1
  • P. Braun
    • 1
  • H. Störi
    • 1
    • 2
  • F. Viehböck
    • 1
  • P. Rödhammer
    • 1
  • K. Kailer
    • 1
  1. 1.Institut für Allgemeine PhysikTechnischen Universität Wien and Metallwerk PlanseeAustria
  2. 2.Institut für Allgemeine PhysikTechnische Universität WienWienAustria

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