Micro-Energy Flow Beam-Shaped Microactuators and Sensors

  • K. Itao
  • H. Hosaka
  • H. Ukita
Conference paper
Part of the International Centre for Mechanical Sciences book series (CISM, volume 361)


From the viewpoint of a micro energy flow, the microsystems design method is investigated for the microactuators and sensors. A simple microsystem is developed as our model, which is excited photothermally by the light from high power laser diode. The exciting point to vibrate a cantilever at maximum amplitude is obtained near the clamped position, which means the maximum efficiency of energy transmission. The energy dissipation characteristics of the cantilever is analytically evaluated. The quantities of dissipantion caused by airflow force, squeeze force internal friction and support loss are calculated and compared with experimental results.

As a result, micro energy input position and the relationship between microbeam size and dissipation ratio are evaluated, which makes progress in a design method of the microsystems excited by a wireless energy supply.


Energy Dissipation Internal Friction Gallium Arsenide Beam Length Piezo Actuator 


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  1. [1]
    H. Ukita, Y. Uenishi, H. Tanaka and K. Itao,“Some Characteristics of a Micro-Mechanical Resonator Integrated with Laser Diodes by Al GaAs/GaAs Micromachining”, J. JSPE 59, 9, 1993,pp. 1560–1565.Google Scholar
  2. [2]
    Y. Yamagata, T.Higuchi, N.Nakamura and S.Hamamura, “A Micro Mobile Mechanism Using Thermal Expansion And Its Theoretical Analysis”, Proc. IEEE MEMS Workshop, 1994, pp. 142–147.Google Scholar
  3. [3]
    H. Hosaka, K. Itao and S. kuroda, “ Evaluation of Energy Dissipation Mechanisms in Vibrational Microactuators”, Proc. IEEE MEMS Workshop, 1994, pp. 193–198.Google Scholar
  4. [4]
    E.A.Avallone edited,“Standard Handbook for mechanical Engineers”, MacGraw-Hill, New York, 1987, p. 5–69.Google Scholar
  5. [5]
    Y. Jimbo and K. Itao,“Energy loss of a cantilever vibrator,”, Journal of the Horological Institute of Japan, 47, 1968, pp. 1–15 (in Japanese).MathSciNetGoogle Scholar

Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • K. Itao
    • 1
  • H. Hosaka
    • 2
  • H. Ukita
    • 2
  1. 1.Chuo UniversityTokyoJapan
  2. 2.Nippon Telegraph and Telephone CorporationTokyoJapan

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