Micro-Robot with Integrated Parallel Links
This paper presents on a micro-robot constructed with integrated parallel links which were made by means of wire electro-discharge machining. The structure of the robot is of rectangular type and the mechanisms of its X and Y axes are constructed by the parallel links of which joints are formed with circular shaped notches. These mechanism are actuated by laminated piezo-actuators. The mechanism and movement of the Z axis are realized by a bimorph piezo-actuator. The damping of this robot body is very small, so that it is controlled by a state feedback controller with the state observer for suppressing the strong resonance. The results obtained experimentally are as follows, (I) dynamic range: 40 μm, (2) bandwidth: about 200 Hz, (3) resolution: submicron order
KeywordsState Observer Step Response State Feedback Controller Strong Resonance Piezo Actuator
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