Micro-Robot with Integrated Parallel Links

  • K. Matsushima
  • K. Nishi
Conference paper
Part of the International Centre for Mechanical Sciences book series (CISM, volume 361)


This paper presents on a micro-robot constructed with integrated parallel links which were made by means of wire electro-discharge machining. The structure of the robot is of rectangular type and the mechanisms of its X and Y axes are constructed by the parallel links of which joints are formed with circular shaped notches. These mechanism are actuated by laminated piezo-actuators. The mechanism and movement of the Z axis are realized by a bimorph piezo-actuator. The damping of this robot body is very small, so that it is controlled by a state feedback controller with the state observer for suppressing the strong resonance. The results obtained experimentally are as follows, (I) dynamic range: 40 μm, (2) bandwidth: about 200 Hz, (3) resolution: submicron order


State Observer Step Response State Feedback Controller Strong Resonance Piezo Actuator 
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  1. 1).
    H. Fukasawa: Design of Micro-Robot with Integrated Parallel Links; MS Thesis of Univ. of Tsukuba, 1990 (in Japanese)Google Scholar
  2. 2).
    M. Tanaka and K. Nakayama: The Bending Elasticity of a Circular Notched Bar as the Monolithic Flexure Hinges in a Precision Mechanism; Vo1.50, No. 3, Appl. Phys. 1981 (in Japanese)Google Scholar
  3. 3).
    K. Furuta Mechanical Systems Control; Ohmu Sha, (in Japanese)Google Scholar

Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • K. Matsushima
    • 1
  • K. Nishi
    • 1
  1. 1.Toin University of YokohamaYokohamaJapan

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