Part of the International Centre for Mechanical Sciences book series (CISM, volume 429)
This section presents the following design case studies: pressure sensors, miniature microphones, accelerometers, mechanical flow sensors and electrostatic actuators.
KeywordsPressure Sensor Electro Mechanical System Flow Sensor Proof Mass Wafer Bonding
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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© Springer-Verlag Wien 2001