Advertisement

Case studies

  • M. Elwenspoek
  • R. Wiegerink
Part of the International Centre for Mechanical Sciences book series (CISM, volume 429)

Abstract

This section presents the following design case studies: pressure sensors, miniature microphones, accelerometers, mechanical flow sensors and electrostatic actuators.

Keywords

Pressure Sensor Electro Mechanical System Flow Sensor Proof Mass Wafer Bonding 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Copyright information

© Springer-Verlag Wien 2001

Authors and Affiliations

  • M. Elwenspoek
    • 1
  • R. Wiegerink
    • 1
  1. 1.Faculteit der ElektrotechniekUniversity of TwenteEnschedeThe Netherlands

Personalised recommendations