The technology for miniaturisation develops from a number of fabrication methods: We mentioned 1C-fabrication methods, but there are many groups at universities and companies that aim at the fabrication of small systems using technologies that derive from more conventional machining, such as cutting, drilling, sand blasting, spark erosion, embossing, casting, mould injection etc. In this chapter we concentrate on silicon micromachining and on the mechanical microsensors that can be fabricated by this method.
KeywordsElectro Mechanical System Mould Insert Quartz Tuning Fork Comb Drive Fluid Handling
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