Abstract
The technology for miniaturisation develops from a number of fabrication methods: We mentioned 1C-fabrication methods, but there are many groups at universities and companies that aim at the fabrication of small systems using technologies that derive from more conventional machining, such as cutting, drilling, sand blasting, spark erosion, embossing, casting, mould injection etc. In this chapter we concentrate on silicon micromachining and on the mechanical microsensors that can be fabricated by this method.
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© 2001 Springer-Verlag Wien
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Elwenspoek, M., Wiegerink, R. (2001). Microelectromechanical Systems. In: Suleman, A. (eds) Smart Structures. International Centre for Mechanical Sciences, vol 429. Springer, Vienna. https://doi.org/10.1007/978-3-7091-2686-8_17
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DOI: https://doi.org/10.1007/978-3-7091-2686-8_17
Publisher Name: Springer, Vienna
Print ISBN: 978-3-211-83681-1
Online ISBN: 978-3-7091-2686-8
eBook Packages: Springer Book Archive