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Microelectromechanical Systems

  • M. Elwenspoek
  • R. Wiegerink
Part of the International Centre for Mechanical Sciences book series (CISM, volume 429)

Abstract

The technology for miniaturisation develops from a number of fabrication methods: We mentioned 1C-fabrication methods, but there are many groups at universities and companies that aim at the fabrication of small systems using technologies that derive from more conventional machining, such as cutting, drilling, sand blasting, spark erosion, embossing, casting, mould injection etc. In this chapter we concentrate on silicon micromachining and on the mechanical microsensors that can be fabricated by this method.

Keywords

Electro Mechanical System Mould Insert Quartz Tuning Fork Comb Drive Fluid Handling 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Wien 2001

Authors and Affiliations

  • M. Elwenspoek
    • 1
  • R. Wiegerink
    • 1
  1. 1.Faculteit der ElektrotechniekUniversity of TwenteEnschedeThe Netherlands

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