Abstract
The first micro-structures produced at Elettra (Trieste, Italy) with deep x-ray lithography are presented in this work. The most important details concerning LIGA technique and in particular deep x-ray lithography using synchrotron radiation are described. The scanning electron microscopy images of test micro-structures made of polymethylmethacrylate characterized by a height of 200 μm and lateral dimensions in between 10 μm and 200 μm are presented. In all the considered cases good accuracy with high aspect ratios and nanometric roughness is observed.
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© 1996 Springer-Verlag Wien
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De Bona, F., Matteucci, M., Mohr, J., Pantenburg, F.J., Zelenika, S. (1996). Microfabrication at the Elettra Synchrotron Radiation Facility. In: Kuljanic, E. (eds) Advanced Manufacturing Systems and Technology. International Centre for Mechanical Sciences, vol 372. Springer, Vienna. https://doi.org/10.1007/978-3-7091-2678-3_58
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DOI: https://doi.org/10.1007/978-3-7091-2678-3_58
Publisher Name: Springer, Vienna
Print ISBN: 978-3-211-82808-3
Online ISBN: 978-3-7091-2678-3
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