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Micro-Dynamic Behaviour of a Nanometer Positioning System

  • Conference paper
AMST ’99

Part of the book series: International Centre for Mechanical Sciences ((CISM,volume 406))

  • 364 Accesses

Abstract

The identification of the main mechanical macro and micro-dynamics nonlinearities which are present in precision positioning systems is performed in this work. The employed compensation technique makes use of a dual-mode control law in which high precision is achieved by using an adaptive pulse width control typology. The obtained positioning accuracy is within the interval of uncertainty of the measurements performed by using a laser interferometric system.

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Author information

Authors and Affiliations

  1. Sincrotrone Trieste, Trieste, Italy

    S. Zelenika

  2. University of Udine, Udine, Italy

    F. De Bona

Authors
  1. S. Zelenika
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  2. F. De Bona
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Editor information

Editors and Affiliations

  1. University of Udine, Italy

    Elso Kuljanic

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© 1999 Springer-Verlag Wien

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Zelenika, S., De Bona, F. (1999). Micro-Dynamic Behaviour of a Nanometer Positioning System. In: Kuljanic, E. (eds) AMST ’99. International Centre for Mechanical Sciences, vol 406. Springer, Vienna. https://doi.org/10.1007/978-3-7091-2508-3_88

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  • DOI: https://doi.org/10.1007/978-3-7091-2508-3_88

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-211-83148-9

  • Online ISBN: 978-3-7091-2508-3

  • eBook Packages: Springer Book Archive

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