Abstract
This chapter serves as an introduction of the MEMS industry that is the target application area for the methodology presented in this book. The reader will be given a quick overview what MEMS are, how they are made, and who is involved in making them.
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© 2014 Springer-Verlag Wien
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Ortloff, D., Schmidt, T., Hahn, K., Bieniek, T., Janczyk, G., Brück, R. (2014). Micro- and Nano Systems: A World of Its Own. In: MEMS Product Engineering. Springer, Vienna. https://doi.org/10.1007/978-3-7091-0706-5_3
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DOI: https://doi.org/10.1007/978-3-7091-0706-5_3
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Publisher Name: Springer, Vienna
Print ISBN: 978-3-7091-0705-8
Online ISBN: 978-3-7091-0706-5
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