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Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania

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Nanofabrication

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Abstract

This chapter provides an overview of the non-lithographic nanofabrication process known as “hard templating”. Nanoporous alumina fabricated by electrochemical anodization continues to be the most widely used hard template although anodically formed nanotubular titania is increasing in importance for templating applications. Hard templates sustain almost no deformation to minor mechanical loads and are unchanged under the action of organic solvents and neutral salt solutions. Their mechanical robustness and relative chemical inertness allows hard templates to be compatible with a variety of chemical, electrochemical and mechanical processes typically used in nanofabrication, several of which are covered in other chapters of this book. Hard templates typically consist of a self-organized array of nanochannels of similar or identical size oriented orthogonally to a substrate. The last 15 years have seen immense progress in the construction of thinner, more versatile hard templates of greater pattern order prepared on ever more diverse substrates. Hard templating has been at the forefront of nanotechnology research as a method to direct the creation of a wide variety of metallic, semiconducting and organic nanostructures. This chapter is organized as follows: The processes used to form hard templates and to improve their pattern order are presented in Sect. 13.2, the use of the template nanochannels to grow ordered functional one-dimensional nanomaterials in Sects. 13.3 and 13.4, and the use of hard templates to affect nanoscale pattern transfer is presented in Sect. 13.5.

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  1. Department of Electrical & Computer Engineering, University of Alberta, Edmonton, AB, Canada

    Karthik Shankar

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  1. , National Research Council of Canada, National Institute for Nanotechnology, Saskatchewan Drive 1142, Edmonton, T6G 2M9, Alberta, Canada

    Maria Stepanova

  2. , Electrical and Computer Engineering, University of Alberta, Edmonton, T6G 2V4, Alberta, Canada

    Steven Dew

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Shankar, K. (2012). Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania. In: Stepanova, M., Dew, S. (eds) Nanofabrication. Springer, Vienna. https://doi.org/10.1007/978-3-7091-0424-8_13

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