Abstract
Nanotechnology is dependent on nanofabrication techniques to structure matter at the 1–100 nm lengthscale. In this book, a variety of nanofabrication techniques are described, including those for lithography using electron and helium ion beams or nanoimprint lithography; for deposition using atomic layer deposition, surface monolayer formation, block copolymers, or electroepitaxy; and for etching using chemical mechanical polishing, ion beam induced reactions, laser nanopatterning, or anodic oxide templating. In each case, principles, methodology, equipment and process parameters are described, along with capabilities and example applications. Taken together, these represent a powerful toolbox of the rapidly evolving pool of nanofabrication techniques.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Roco MC, Mirkin CA, Hersam MC. Nanotechnology research directions for societal needs in 2020, retrospective and outlook. Heidelberg Dordrecht London New York: Springer; 2011. ISBN 978-94-007-1167-9.
Roco M, Presentation on the national nanotechnology initiative 2. Washington, DC; 2010.
Cui Z. Nanofabrication: principles, capabilities and limits. Berlin: Springer; 2008. ISBN 0387755764.
Ampere A. Nanofabrication: fundamentals and applications. Singapore: World Scientific Publishing; 2008. ISBN 9812700765.
Wiederrecht G, editor. Handbook of nanofabrication. Amsterdam: Elsevier; 2010. ISBN 0123751764.
Ohtsu M, editor. Nanophotonics and nanofabrication. Darmstadt: Wiley-VCH; 2009. ISBN 9783527321216.
Ostrikov K, Xu S. Plasma-aided nanofabrication: from plasma sources to nanoassembly. Darmstadt: Wiley-VCH; 2007. ISBN 9783527406333.
Wang M, editor. Lithography. Vukovar: Intech; 2010. ISBN 9789533070643.
Kumar Challa, editor. Nanostructured thin films and surfaces. Darmstadt: Wiley-VCH; 2010. ISBN 9783527321551.
Acknowledgements
The authors are grateful for the support of the Natural Sciences and Engineering Research Council of Canada, the National Institute for Nanotechnology, and the University of Alberta NanoFab. As editors, we are also grateful for the hard work, vast expertise and professional manner of the contributing authors who have taken time out of their very busy schedules to write an excellent set of chapters on a fascinating topic.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2012 Springer-Verlag/Wien
About this chapter
Cite this chapter
Dew, S.K., Stepanova, M. (2012). Directions in Nanofabrication. In: Stepanova, M., Dew, S. (eds) Nanofabrication. Springer, Vienna. https://doi.org/10.1007/978-3-7091-0424-8_1
Download citation
DOI: https://doi.org/10.1007/978-3-7091-0424-8_1
Published:
Publisher Name: Springer, Vienna
Print ISBN: 978-3-7091-0423-1
Online ISBN: 978-3-7091-0424-8
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)