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Literatur

Bücher und Übersichtsartikel

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Authors and Affiliations

  1. Institut für Festkörper-Technologie, Fraunhofer-Gesellschaft, München, Deutschland

    Dr.-Ing. Heiner Ryssel

  2. Fraunhofer-Gesellschaft, Technischen Universität München sowie Institut für Festkörper-Technologie, München, Deutschland

    Prof. Dr.-Ing. Ingolf Ruge (o. Professor)

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  1. Dr.-Ing. Heiner Ryssel
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© 1978 B. G. Teubner, Stuttgart

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Ryssel, H., Ruge, I. (1978). Literatur. In: Ionenimplantation. Vieweg+Teubner Verlag, Wiesbaden. https://doi.org/10.1007/978-3-663-05668-3_10

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  • DOI: https://doi.org/10.1007/978-3-663-05668-3_10

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