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Related Deposition Methods

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Tetrahedrally Bonded Amorphous Carbon Films I

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 263))

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Abstract

The plasma arising from pulse laser excitation (for sufficient high intensities and especially with excimer lasers ) resembles the plasma of vacuum arc discharges

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References

  1. I.S. Athwal, A. Mele, E.A. Ogryzlo, Techniques for depositing DLC films by pulsed laser ablation of organic solids. Diam. Relat. Mater. 1, 731–734 (1992)

    Article  Google Scholar 

  2. S. Amorusa, X. Wang, C. Altucci, C. De Lisio, M. Armenante, R. Bruzzese, N. Spinelli, R. Velotta, Double peak distribution of electron and ion emission profile during femtosecond laser ablation of metals. Appl. Surf. Sci. 186, 358–363 (2002)

    Article  Google Scholar 

  3. A.V. Bulgakov, N.M. Bulgakova, Thermal model of pulsed laser ablation under the condition of formation and heating of a radiation-absorbing plasma. Quantum Electron. 29, 433–437 (1999)

    Article  Google Scholar 

  4. P.S. Banks, L. Dinh, B.C. Stuart, M.D. Feit, A.M. Komashko, A.M. Rubenchik, M.D. Perry, W. McLean, Short-pulse laser deposition of diamond-like carbon thin films. Appl. Phys. A 69, 347–353 (1999)

    Article  Google Scholar 

  5. P. Balling, J. Schou, Femtosecond-laser ablation dynamics of dielectrics: basics and applications for thin films. Rep. Progress Phys. 76, 036502 (2013)

    Article  Google Scholar 

  6. F. Claeyssens, Fundamental Studies of Pulsed Laser Ablation, Thesis, University Bristol, 2001

    Google Scholar 

  7. F. Claeyssens, M.N.R. Ashfold, E. Sofoulakis, Plume emissions accompanying 248 nm laser ablation of graphite in vacuum: effects of pulse duration. J. Appl. Phys. 91, 6162–6172 (2002)

    Article  Google Scholar 

  8. C.B. Collins, F. Davanloo, Diamond-like carbon material produced by laser plasma deposition. EP 0 527 915 (08. 05. 1991)

    Google Scholar 

  9. C.B. Collins, F. Davanloo, E.M. Juengerman, W.R. Osborn, D.R. Jander, Laser phasing source of amorphic diamond. Appl. Phys. Lett. 54, 216–218 (1989)

    Article  Google Scholar 

  10. C.B. Collins, F. Davanloo, D.R. Jander, T.J. Lee, H. Park, J.H. You, Microstructure of amorphous diamond films. J. Appl. Phys. 69, 7862–7870 (1991)

    Article  Google Scholar 

  11. C.B. Collins, F. Davanloo, E.M. Juengerman, D.R. Jander, T.J. Lee, Preparation and study of laser plasma diamond. Surf. Coat. Technol. 47, 244–251 (1991)

    Article  Google Scholar 

  12. C.B. Collins, F. Davanloo, D.R. Jander, T.J. Lee, J.H. You, H. Park, Microstructural and mechanical properties of amorphic diamond. Diam. Films Technol. 2, 25–49 (1992)

    Google Scholar 

  13. C.B. Collins, F. Davanloo, T.J. Lee, H. Park, J.H. You, Noncrystalline films with the chemistry, bonding, and properties of diamond. J. Vac. Sci. Technol. B 11, 1936–1941 (1993)

    Article  Google Scholar 

  14. F. Davanloo, C.B. Collins, Nanophase diamond films. US 5 411 797 (1. 4. 1993)

    Google Scholar 

  15. F. Davanloo, E.M. Juengerman, D.R. Jander, T.J. Lee, C.B. Collins, Amorphic diamond films produced by a laser plasma source. J. Appl. Phys. 67, 2081–2087 (1990)

    Article  Google Scholar 

  16. F. Davanloo, E.M. Juengerman, D.R. Jander, T.J. Lee, C.B. Collins, Laser plasma diamond. J. Mater. Res. 5, 2398–2404 (1990)

    Article  Google Scholar 

  17. F. Davanloo, T.J. Lee, J.H. You, H. Park, C.B. Collins, Progress in the characterization of nanophase diamond films uniquely produced by a laser plasma discharge source. Surf. Coat. Technol. 62, 564–569 (1993)

    Article  Google Scholar 

  18. G. Dumitru, V. Romano, H.P. Weber, M. Sentis, W. Marine, Femtosecond ablation of ultrahard materials. Appl. Phys. A 74, 729–739 (2002)

    Article  Google Scholar 

  19. E.G. Gamaly, The physics of ultra-short laser interaction with solids at non-relativistic intensities. Phys. Rep. 508, 91–243 (2011)

    Article  Google Scholar 

  20. J. Greer, Large-area commercial pulsed laser deposition, in Pulsed Laser Deposition of Thin Films: Applications-Led Growth of Functional Materials, ed. by R. Eason (Wiley, Hoboken/NJ, 2007), pp. 191–213

    Google Scholar 

  21. F. Garrelie, A.S. Loir, C. Donnet, F. Rogemond, R. Le Harzic, M. Belin, E. Audouard, P. Laporte, Femtosecond pulsed laser deposition of diamond-like carbon thin films for tribological applications. Surf. Coat. Technol. 163–164, 306–312 (2003)

    Article  Google Scholar 

  22. Q.R. Hou, J. Gao, Pulsed laser deposition of diamond-like carbon films under a magnetic field. J. Phys. Condens. Matter 9, 10333–10337 (1997)

    Article  Google Scholar 

  23. Q.R. Hou, J. Gao, Influence of a magnetic field on deposition of diamond-like carbon films. Appl. Phys. A 67, 417–420 (1998)

    Article  Google Scholar 

  24. A. Hu, S. Griesing, M. Rybachuk, Q.B. Lu, W.W. Duley, Nanobuckling and x-ray photoelectron spectra of carbyne-rich tetrahedral carbon films deposited by femtosecond laser ablation at cryogenic temperatures. J. Appl. Phys. 102, 074311 (2007)

    Article  Google Scholar 

  25. E.M. Hsu, N.A. Mailman, G.A. Botton, H.K. Haugen, Microscopic investigation of single-crystal diamond following ultrafast laser irradiation. Appl. Phys. A 103, 185–192 (2011)

    Article  Google Scholar 

  26. T. Katsuno, C. Godet, J.C. Orlianges, A.S. Loir, P. Garrelie, A. Catherinot, Optical properties of high-density amorphous carbon films grown by nanosecond and femtosecond pulsed laser ablation. Appl. Phys. A 81, 471–476 (2005)

    Article  Google Scholar 

  27. H. Köster, K. Mann, Influence of beam parameters on the laser induced particle emission from surfaces. Appl. Surf. Sci. 109–110, 428–432 (1997)

    Article  Google Scholar 

  28. J. Krishnaswamy, A. Rengan, A.R. Srivatsa, G. Matera, J. Narayan, Laser and plasma enhanced deposition of diamond and diamondlike films by physical and chemical vapor deposition techniques. SPIE J. 1190, 109-117 (1989)

    Google Scholar 

  29. J. Krishnaswamy, A. Rengan, J. Narayan, K. Vedam, C.J. McHargue, Thin-film deposition by a new laser ablation and plasma hybrid technique. Appl. Phys. Lett. 54, 2455–2457 (1989)

    Article  Google Scholar 

  30. J. Karpman, M. Riabkina-Fishman, J. Zahavi, D. Dhamelincourt, Properties of unhydrogenated diamond-like carbon films deposited by ArF excimer laser. Diam. Relat. Mater. 4, 10–14 (1994)

    Article  Google Scholar 

  31. B.R. Mehta, E.A. Ogryzlo, Deposition of diamond-like films by laser ablation. Surf. Coat. Technol. 43–44, 80–87 (1990)

    Article  Google Scholar 

  32. K. Mann, K. Rohr, Differential measurement of absolute ion yield from laser-produced C plasma. Laser Part. Beams 10, 435–446 (1992)

    Article  Google Scholar 

  33. D.L. Pappas, K.L. Saenger, J. Bruley, W. Krakow, J.J. Cuomo, T. Gu, R.W. Collins, Pulsed laser deposition of diamond-like carbon films. J. Appl. Phys. 71, 5675–5684 (1992)

    Article  Google Scholar 

  34. F. Qjan, V. Craciun, R.K. Singh, S.D. Dutta, P.P. Pronko, High intensity femtosecond laser deposition of diamond-like carbon thin films. J. Appl. Phys. 86, 2281–2290 (1999)

    Article  Google Scholar 

  35. F. Qian, R.K. Singh, S.K. Dutta, P.P. Pronko, Laser deposition of diamond like carbon films at high intensities. Appl. Phys. Lett. 67, 3120–3122 (1995)

    Article  Google Scholar 

  36. D. Ramanathan, P.A. Molian, Micro- and submicromachining of type IIa single crystal diamond using a Ti:sapphire femtosecond laser. J. Manuf. Sci. Eng. 124, 389–396 (2002)

    Article  Google Scholar 

  37. A. Rengan, J. Narayan, Optical, structural and mechanical properties of diamondlike carbon films deposited by laser ablation and laser-plasma ablation technique, in Laser Ablation of Electronic Materials, ed. by E. Fogarassy, S. Lazare (Elsevier, 1992), pp. 363–376

    Google Scholar 

  38. A. Rengan, J. Narayan, C. Jahnke, S. Bedge, J.L. Park, M. Li, Characteristics of diamond-like carbon films formed by a hybrid laser-plasma ablation of graphite. Mater. Sci. Eng. B 15, 15–24 (1992)

    Article  Google Scholar 

  39. B. Schultrich, Film deposition by laser and arc technologies. Contrib. Plasma Phys. 39, 463–472 (1999)

    Article  Google Scholar 

  40. T. Shinozaki, T. Ooie, T. Yano, J.P. Zhao, Zh.Y. Chen, M. Yoneda, Laser-induced optical emission of carbon plume by excimer and Nd:YAG laser irradiation. Appl. Surf. Sci. 197–198, 263–267 (2002)

    Article  Google Scholar 

  41. P.L. Silvestrelli, M. Parrinello, Ab initio molecular dynamics simulation of laser melting of graphite. J. Appl. Phys. 83, 2478–2483 (1998)

    Article  Google Scholar 

  42. A.A. Voevodin, M.S. Donley, Preparation of amorphous diamond-like carbon by pulsed laser deposition: a critical review. Surf. Coat. Technol. 82, 199–213 (1996)

    Article  Google Scholar 

  43. P.A. VanRompay, M. Nantel, P.P. Pronko, Pulse-contrast effects on energy distributions of C1+ to C4+ ions for high-intensity 100-fs laser-ablation plasmas. Appl. Surf. Sci. 127–129, 1023–1028 (1998)

    Article  Google Scholar 

  44. T. Witke, Optische Plasmaspektroskopie und Kurzzeituntersuchungen an gepulsten Laser-, Bogen- und Kanalfunkenplasmen. (=Optical plasma spectroscopy and short-time investigations on pulsed laser, arc and spark plasmas) Thesis, Technische Universität Dresden, 1996. (Shaker, Aachen, 1996)

    Google Scholar 

  45. S.S. Wagal, E.M. Juengerman, C.B. Collins, Diamond-like carbon films prepared with a laser ion source. Appl. Phys. Lett. 53, 187–188 (1988)

    Article  Google Scholar 

  46. T. Witke, T. Schuelke, J. Berthold, C.F. Meyer, B. Schultrich, Deposition of hard amorphous carbon coatings by laser and arc methods. Surf. Coat. Technol. 116–119, 609–613 (1999)

    Article  Google Scholar 

  47. O.H.Y. Zalloum, M. Parrish, A. Terekhov, W. Hofmeister, On femtosecond micromachining of HPHT single-crystal diamond with direct laser writing using tight focusing. Opt. Express 18, 13122–13135 (2010)

    Article  Google Scholar 

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  1. Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, Germany

    Bernd Schultrich

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Schultrich, B. (2018). Related Deposition Methods. In: Tetrahedrally Bonded Amorphous Carbon Films I. Springer Series in Materials Science, vol 263. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-55927-7_16

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