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Special Arc Modes with Reduced Macroparticle Emission

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Tetrahedrally Bonded Amorphous Carbon Films I

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 263))

Abstract

A promising way towards arc deposited carbon films of higher perfectness consists in the reduction or even complete suppression of the macroparticle emission in addition to or instead of their troublesome separation.

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References

  1. V.I. Gorokhovsky, V.P. Polistchook, I.M. Yartsev, J.W. Glaser, Distributed arc sources, in Handbook of Vacuum Arc Science and Technology, Fundamentals and Applications, ed. by R.L. Boxman, P.J. Martin, D.M. Sanders (Noyes, Park Ridge/NJ, 1995), pp. 423–444

    Google Scholar 

  2. V.F. Puchkarev, S.M. Chesnokov, Erosion rate and voltage distribution in contracted and diffuse low current vacuum arcs. J. Phys. D 25, 1760–1766 (1992)

    Article  Google Scholar 

  3. J.L. Hirshfield, L.A. Levin, O. Danziger, Vacuum arc for centrifuge isotope enrichment. IEEE Trans. Plasma Sci. 17, 695–700 (1989)

    Article  Google Scholar 

  4. A.W. Koch, A.W. Nurnberg, R. Behrisch, Investigation of vacuum arcs on graphite cathodes. J. Nucl. Mater. 122–123, 1437–1439 (1984)

    Article  Google Scholar 

  5. V.S. Veerasamy, G.A.J. Amaratunga, M. Weiler, J.S. Park, W.I. Milne, A distributed carbon cathodic vacuum arc. Surf. Coat. Technol. 68–69, 301–308 (1994)

    Article  Google Scholar 

  6. V.I. Gorokhovsky, V.P. Polistchook, I.M. Yartsev, Processes in a plasma arc installation for vacuum coating depositions, part 1: plasma generation. Surf. Coat. Technol. 61, 101–107 (1993)

    Article  Google Scholar 

  7. K. Goedicke, B. Scheffel, S. Schiller, Plasma-activated high rate electron beam evaporation using a spotless cathodic arc. Surf. Coat. Technol. 68–69, 799–803 (1994)

    Article  Google Scholar 

  8. B.M. Scheffel, Untersuchungen zum diffusen kathodischen Vakuumbogen bei der plasmaaktivierten Hochratebedampfung. (= Investigations on the diffuse cathodic vacuum arc for the plasma-activated high-rate evaporation) Thesis, University Magdeburg, 2000

    Google Scholar 

  9. I.I. Aksenov, V.A. Belous, V.M. Khoroshikh, Formation of filtered intense vacuum-arc plasma flows, in Proceeding of XVIIth International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV), Berkeley/CA (1996), pp. 895–899

    Google Scholar 

  10. I.I. Aksenov, V.M. Khoroshikh, N.S. Lomino, V.D. Ovcharenko, Y.A. Zadneprovsky, Transformation of axial vacuum-arc plasma flows into radial streams and their use in coating deposition. Trans. IEEE Plasma Sci. 27, 1026–1029 (1999)

    Article  Google Scholar 

  11. J.-P. Heinß, Wasserstofffreie amorphe Kohlenstoffschichten – abgeschieden durch plasmaktivierte Hochratebedampfung. (= Hydrogen free amorphous carbon coatings – deposited with plasma-activated high-rate evaporation) Vakuum Forschung Praxis 19(5), 20–23 (2007)

    Google Scholar 

  12. M. Chhowalla, C.A. Davis, M. Weiler, B. Kleinsorge, G.A.J. Amaratunga, Stationary carbon cathodic arc: plasma and film characterization. J. Appl. Phys. 79, 2237–2244 (1996)

    Article  Google Scholar 

  13. M. Chhowalla, M. Weiler, C.A. Davis, B. Kleinsorge, G.A.J. Amaratunga, Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter. Appl. Phys. Lett. 67, 894–896 (1995)

    Article  Google Scholar 

  14. K. Yukimura, R. Isono, T. Monguchi, K. Yoshioka, S. Masamune, Pulsed metal ion source by triggerless shunting arc discharge. J. Vac. Sci. Technol. B 17, 871–874 (1999)

    Article  Google Scholar 

  15. K. Yukimura, Y. Tani, Generation of triggerless silicon shunting plasma and ion extraction. Surf. Coat. Technol. 142–144, 388–391 (2001)

    Article  Google Scholar 

  16. T. Takaki, T. Murakam, S. Mukaigawa, T. Fujiwara, K. Yukimura, Shunting arc generation by parallel rod configuration. Plasma Sour. Sci. Technol. 20, 015012 (2011)

    Article  Google Scholar 

  17. K. Yukimura, K. Yoshioka, Y. Tani, Carbon shunting arc and its induced plasma. Rev. Sci. Instrum. 71, 1184–1186 (2000)

    Article  Google Scholar 

  18. A. Anders, I.G. Brown, R.A. McGill, M.R. Dickinson, ‘Triggerless’ triggering of vacuum arcs. J. Phys. D 31, 584–587 (1998)

    Article  Google Scholar 

  19. A. Anders, J. Schein, N. Qi, Pulsed vacuum-arc ion source operated with a “triggerless” arc initiation method. Rev. Sci. Instrum. 71, 827–829 (2000)

    Article  Google Scholar 

  20. K. Yukimura, S. Masamune, Shunting arc plasma generation over a wide range of ambient pressure and ion extraction. Rev. Sci. Instrum. 73 (Part II), 860–862 (2002)

    Google Scholar 

  21. K. Takaki, S. Mukaigawa, T. Fujiwara, M. Kumagai, K. Yukimura, Characteristics of shunting arc discharge for carbon ion source. Nucl. Instrum. Methods Phys. Res. B 206, 794–797 (2003)

    Article  Google Scholar 

  22. K. Takaki, O. Kumagai, R. Hasegawa, S. Mukaigawa, T. Fujiwara, M. Kumagai, K. Yukimura, Characteristics of magnetically driven shunting arc plasma for amorphous carbon film deposition. Thin Solid Films 506–507, 150–154 (2006)

    Article  Google Scholar 

  23. K. Takaki, O. Kumagai, S. Mukaigawa, T. Fujiwara, M. Kumagai, K. Yukimura, Ion extraction from magnetically driven carbon shunting arc plasma. IEEE Trans. Plasma Sci. 34, 1209–1215 (2006)

    Article  Google Scholar 

  24. K. Yukimura, M. Kumagai, M. Kumagai, H. Saito, M. Kohata, K. Takaki, Deposition of amorphous carbon using a shunting arc discharge. Surf. Coat. Technol. 174–175, 1187–1190 (2003)

    Article  Google Scholar 

  25. K. Takaki, R. Hasegawa, S. Nakamura, S. Mukaigawa, T. Fujiwara, M. Kumagai, K. Yukimura, Self-magnetic drive of a shunting arc. Surf. Coat. Technol. 186, 182–186 (2004)

    Article  Google Scholar 

  26. K. Yukimura, M. Kumagai, K. Takaki, R. Hasegawa, S. Nakamura, S. Mukaigawa, T. Fujiwara, High deposition rate of amorphous carbon using a magnetically driven shunting arc discharge. Surf. Coat. Technol. 196, 203–206 (2005)

    Article  Google Scholar 

  27. K. Takaki, K. Imanishi, T. Murakami, S. Mukaigawa, T. Fujiwara, Y. Suda, K. Yukimura, Production of nitrogen-containing carbon plasma using shunting arc discharge for carbon nitride films preparation. Phys. Status Solidi (a) 205, 971–975 (2008)

    Article  Google Scholar 

  28. K. Yukimura, K. Ego, K. Takaki, S. Mukaigawa, T. Fujiwara, Amorphous carbon film deposition by PBII&D using shunting arc discharge. Nucl. Instrum. Methods Phys. Res. B 242, 321–323 (2006)

    Article  Google Scholar 

  29. K. Yukimura, N. Tenno, S. Masamune, Carbon shunting arc in RF nitrogen plasmas – a basic study on plasma-based ion implantation. Vacuum 65, 341–346 (2002)

    Article  Google Scholar 

  30. E. Reinhold, J. Faber, Large area electron beam physical vapor deposition (EB-PVD) and plasma activated electron beam (EB) evaporation – status and prospects. Surf. Coat. Technol. 206, 1653–1659 (2011)

    Article  Google Scholar 

  31. M. von Ardenne, Tabellen zur angewandten Physik, vol. 2 (Deutscher Verlag Wissenschaften, Berlin, 1979), p. 28

    Google Scholar 

  32. O. Kumagai, T. Fujiwara, S. Mukaigawa, K. Takaki, K. Yukimura, Ion extraction from magnetically driven shunting arc and estimation of ion density at sheath boundary. Surf. Coat. Technol. 201, 6536–6538 (2007)

    Article  Google Scholar 

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Authors and Affiliations

  1. Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, Germany

    Bernd Schultrich

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  1. Bernd Schultrich
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Schultrich, B. (2018). Special Arc Modes with Reduced Macroparticle Emission. In: Tetrahedrally Bonded Amorphous Carbon Films I. Springer Series in Materials Science, vol 263. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-55927-7_12

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