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Reinraumtechnik pp 425–468Cite as

Ver- und Entsorgung von Reinstmedien

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Part of the book series: VDI-Buch ((VDI-BUCH))

Zusammenfassung

Die Reinstmedientechnik als Teilgebiet der Reinraumtechnik und der Prozessver- und -entsorgungstechnik beschäftigt sich mit der Ver- und Entsorgung von Prozessgeräten mit Prozessmedien hoher und höchster Reinheit, einschließlich des Recyclings und anderweitiger Wiedernutzbarmachung von Ressourcen.

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Author information

Authors and Affiliations

  1. AGS EPG FES, Applied Materials GmbH, Philipp-Hauck-Straße 6, 85622, Feldkirchen, Deutschland

    Andreas Neuber

Authors
  1. Andreas Neuber
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Correspondence to Andreas Neuber .

Editor information

Editors and Affiliations

  1. Wiesbaden, Germany

    Lothar Gail

  2. Abteilung Reinst- und Mikroproduktion, Fraunhofer-Institut für Produktionstechnik und Automatisierung IPA, Stuttgart, Germany

    Udo Gommel

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© 2018 Springer-Verlag GmbH Deutschland, ein Teil von Springer Nature

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Neuber, A. (2018). Ver- und Entsorgung von Reinstmedien. In: Gail, L., Gommel, U. (eds) Reinraumtechnik. VDI-Buch. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-54915-5_8

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