The Micromechanical Accelerometer and the Micromechanical Gyroscope
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The micromechanical inertial sensors in the fabrication of micromechanical technology mainly include the micromechanical accelerometer and the micromechanical gyroscope.
KeywordsMicromechanical Accelerometers Micromechanical Gyroscope Bulk Micromachining Process Mechanical Thermal Noise Angular Velocity Sensor
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© National Defense Industry Press and Springer-Verlag GmbH Germany 2018