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The Micromechanical Accelerometer and the Micromechanical Gyroscope

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Abstract

The micromechanical inertial sensors in the fabrication of micromechanical technology mainly include the micromechanical accelerometer and the micromechanical gyroscope.

Keywords

Micromechanical Accelerometers Micromechanical Gyroscope Bulk Micromachining Process Mechanical Thermal Noise Angular Velocity Sensor 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© National Defense Industry Press and Springer-Verlag GmbH Germany 2018

Authors and Affiliations

  1. 1.Beijing Information Science and Technology UniversityBeijingChina
  2. 2.Academy of Armored Forces EngineeringBeijingChina

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