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The Micromechanical Accelerometer and the Micromechanical Gyroscope

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Non-driven Micromechanical Gyroscopes and Their Applications
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Abstract

The micromechanical inertial sensors in the fabrication of micromechanical technology mainly include the micromechanical accelerometer and the micromechanical gyroscope.

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Correspondence to Fuxue Zhang .

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© 2018 National Defense Industry Press and Springer-Verlag GmbH Germany

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Zhang, F., Zhang, W., Wang, G. (2018). The Micromechanical Accelerometer and the Micromechanical Gyroscope. In: Non-driven Micromechanical Gyroscopes and Their Applications. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-54045-9_5

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  • DOI: https://doi.org/10.1007/978-3-662-54045-9_5

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-54043-5

  • Online ISBN: 978-3-662-54045-9

  • eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)

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