Abstract
The micromechanical inertial sensors in the fabrication of micromechanical technology mainly include the micromechanical accelerometer and the micromechanical gyroscope.
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© 2018 National Defense Industry Press and Springer-Verlag GmbH Germany
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Zhang, F., Zhang, W., Wang, G. (2018). The Micromechanical Accelerometer and the Micromechanical Gyroscope. In: Non-driven Micromechanical Gyroscopes and Their Applications. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-54045-9_5
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DOI: https://doi.org/10.1007/978-3-662-54045-9_5
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-54043-5
Online ISBN: 978-3-662-54045-9
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