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Büttgenbach, S. (2016). Reaktives Ionentiefenätzen. In: Mikrosystemtechnik. Technik im Fokus. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-49773-9_7
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DOI: https://doi.org/10.1007/978-3-662-49773-9_7
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