Skip to main content
SpringerLink
Log in

Der piezoresistive Effekt

  • Chapter
  • First Online:
Mikrosystemtechnik

Part of the book series: Technik im Fokus ((TECHNIK))

  • 6240 Accesses

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
eBook
USD 14.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 19.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Literatur

  1. C.S. Smith, Piezoresistance effect in germanium and silicon. Physical Review 94, 42–49 (1954)

    Article  Google Scholar 

  2. B. Kloeck, Piezoresistive sensors, in Sensors Set: A Comprehensive Survey, ed. by W. Göpel, J. Hesse, J.N. Zemel (Wiley-VCH, Weinheim, 1995)

    Google Scholar 

  3. http://terahz.org/_pdf/GenealogyOfSolidStateSensorsInTheUSA.pdf‌, Zugegriffen: 27. Mai 2016

  4. E. Mounier, MEMS markets & applications, 2nd Workshop on Design, Control and Software Implementation for Distributed MEMS, Besançon, Frankreich, 02.–03.04.2012. http://dmems.univ-fcomte.fr/presentations/mounier.pdf, Zugegriffen: 27. Mai 2016

  5. K. Reif (Hrsg.), Sensoren im Kraftfahrzeug (Vieweg + Teubner, Springer Fachmedien, Wiesbaden, 2010)

    Google Scholar 

  6. G. Gerlach, R. Werthschützky, 50 Jahre Entdeckung des piezoresistiven Effekts – Geschichte und Entwicklungsstand piezoresistiver Sensoren. Technisches Messen 72, 53–76 (2005)

    Article  Google Scholar 

  7. T.K. Bhattacharyya, A.L. Roy, MEMS piezoresistive accelerometers, in Micro and smart devices and systems Springer Tracts in Mechanical Engineering., ed. by K.J. Vinoy, G.K. Ananthasuresh, R. Pratap, S.B. Krupanidhi (Springer, India, 2014), S. 19–34

    Chapter  Google Scholar 

  8. N.V. Lavrik, M.J. Sepaniak, P.G. Datskos, Cantilever transducers as a platform for chemical and biological sensors. Review of Scientific Instruments 75, 2229–2253 (2004)

    Article  Google Scholar 

  9. A. Tibrewala, A. Phataralaoha, S. Büttgenbach, Simulation, fabrication and characterization of a 3D piezoresistive force sensor. Sensors and Actuators A 147, 430–435 (2008)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institut für Mikrotechnik, Technische Universität Braunschweig, Braunschweig, Deutschland

    Stephanus Büttgenbach

Authors
  1. Stephanus Büttgenbach
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

Copyright information

© 2016 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Büttgenbach, S. (2016). Der piezoresistive Effekt. In: Mikrosystemtechnik. Technik im Fokus. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-49773-9_3

Download citation

Publish with us

Policies and ethics

Search

Navigation