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Mikro-Nano-Integration

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Mikrosystemtechnik

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  1. Institut für Mikrotechnik, Technische Universität Braunschweig, Braunschweig, Deutschland

    Stephanus Büttgenbach

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  1. Stephanus Büttgenbach
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Büttgenbach, S. (2016). Mikro-Nano-Integration. In: Mikrosystemtechnik. Technik im Fokus. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-49773-9_11

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