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Introduction

  • Zhiqiang LiEmail author
Chapter
  • 374 Downloads
Part of the Springer Theses book series (Springer Theses)

Abstract

With continuous expansion of semiconductor consumption market, integrate circuit (IC) has developed rapidly in the past 40 years. As the foundation of information industry, IC has played an irreplaceable role in commerce, national defense, communication, and daily life. Meanwhile, the information industry based on IC has created remarkable economic benefits, which has exceeded that of traditional industries such as auto, fossil oil, and steel industry. Nowadays, IC is moving toward higher integration density, larger circuit speed, and lower power consumption, and all this will hasten humanity’s advance into information age.

Keywords

Schottky Barrier Height Specific Contact Resistivity High Integration Density Effective Oxide Thickness Device Gate Length 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2016

Authors and Affiliations

  1. 1.Institute of MicroelectronicsPeking UniversityBeijingChina

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