Impact of Heavy Ion Species and Energy on SEE Characteristics of Three-Dimensional Integrated Circuit
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Via Geant4 simulations, SEEs are characterized for each die of 3DIC with different heavy ion species and energy in this paper. It is found that the incident ions with high atomic number make the SEE more serious for each die and there are obvious differences on SEE characteristics between each die after the low energy heavy ions striking 3DIC. Our research also indicates that SEE sensitivity of inner dies is no less than that of the outer ones unless the heavy ions stop above the inner dies. It is because the secondary particles induced by nuclear reaction and the scattered heavy ions caused by low energy incident can trigger severe multi-SEEs. It concludes that the inner dies of 3DIC also need to be hardened, and the technologies restraining severe multi-SEEs should be taken for them, if the higher reliability is required.
KeywordsThree-dimensional integration circuit (3DIC) Heavy ions Single event effects (SEEs) Deposited charge
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