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Part of the book series: Springer Theses ((Springer Theses))

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Abstract

This chapter summarizes the main contributions and the key innovations of this thesis, and the prospectives are also given. We believe that the proposed micro-/nanointegrated fabrication technology and its applications in microenergy harvesting field is of significance for the development of micro-/nano-science and technology.

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Reference

  1. X.S. Zhang, B. Meng, F.Y. Zhu, W. Tang, H.X. Zhang, Switchable wetting & flexible SiC thin film with nanostructures for microfluidic surface-enhanced Raman scattering sensors. Sens. Actuators A 208, 166–173 (2014)

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Correspondence to Xiao-Sheng Zhang .

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© 2016 Springer-Verlag Berlin Heidelberg

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Zhang, XS. (2016). Summary and Perspectives. In: Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting. Springer Theses. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-48816-4_6

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  • DOI: https://doi.org/10.1007/978-3-662-48816-4_6

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-48814-0

  • Online ISBN: 978-3-662-48816-4

  • eBook Packages: EngineeringEngineering (R0)

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