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Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

Part of the book series: Springer Theses ((Springer Theses))

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Abstract

This chapter mainly reviews the development road map of micro-/nanointegrated fabrication technology as well as the previous research work of micro-/nanohierarchical structures. Consequently, the motivation, purpose, and innovative contributions of this thesis are briefly summarized.

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Authors and Affiliations

  1. Institute of Microelectronics, Peking University, Beijing, 100871, China

    Xiao-Sheng Zhang

  2. Microsystems Laboratory, École Polytechnique Fédérale de Lausanne, 1015, Lausanne, Switzerland

    Xiao-Sheng Zhang

  3. Institute of Industrial Science, The University of Tokyo, Tokyo, 153-8505, Japan

    Xiao-Sheng Zhang

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  1. Xiao-Sheng Zhang
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Correspondence to Xiao-Sheng Zhang .

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Zhang, XS. (2016). Introduction. In: Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting. Springer Theses. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-48816-4_1

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  • DOI: https://doi.org/10.1007/978-3-662-48816-4_1

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-48814-0

  • Online ISBN: 978-3-662-48816-4

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