Abstract
Due to the limited range of piezo actuator elements available of only one to several micrometers, it is necessary to use a coarse approach to bring tip and sample into such a close distance that the (tube) scanner can be used for the fine motion (up to several micrometers) during scanning. The task of coarse positioning largely determines the SPM design since nowadays almost all SPMs use a tube scanner for the fine motion. Here we concentrate on the general principles of SPM design and take the STM as an example. Specific aspects concerning atomic force microscopy designs will be discussed later.
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© 2015 Springer-Verlag Berlin Heidelberg
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Voigtländer, B. (2015). Scanning Probe Microscopy Designs. In: Scanning Probe Microscopy. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-45240-0_4
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DOI: https://doi.org/10.1007/978-3-662-45240-0_4
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-45239-4
Online ISBN: 978-3-662-45240-0
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