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Pose-varied Multi-axis Optical Finishing Systems pp 65–84Cite as

Conquering the Dynamic Limitation of Velocity

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Abstract

Deterministic subaperture optical finishing systems often employ a time-invariant tool influence function (TIF) to figure localized surface errors by varying the tool transverse velocity. With this regime, the finishing efficiency may be not proportional to the increase of removal rate because of the dynamic (i.e., velocity) limitation of the machines. This chapter presented a controllable and time-variant TIF (CTVT) finishing regime and built by series of TIF spot experiments, in which the TIF also serves as a variable to control the material removal when the desired transverse velocity of the machine exceeds the allowed maximal velocity. Compared with other methods, CTVT has better performance with respect to the convergence rate, finishing efficiency, operability, and versatility. Process validations were conducted on a self-developed finishing machine. Without CTVT, the first finishing left a 76 nm dent at central region because of the velocity limitation of turntable. Employing CTVT, the dent was completely removed by the second finishing. CTVT improved convergence rate and finishing efficiency from 0.63 and 0.113 to 0.74 and 0.247, respectively. Another experiment with CTVT and larger removal rate increased convergence rate and finishing efficiency to 0.924 and 0.347.

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Authors and Affiliations

  1. Beijing Institute of Technology, Beijing, China

    Haobo Cheng

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  1. Haobo Cheng
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Correspondence to Haobo Cheng .

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© 2015 Springer-Verlag Berlin Heidelberg

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Cheng, H. (2015). Conquering the Dynamic Limitation of Velocity. In: Pose-varied Multi-axis Optical Finishing Systems. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-44182-4_3

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  • DOI: https://doi.org/10.1007/978-3-662-44182-4_3

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-44181-7

  • Online ISBN: 978-3-662-44182-4

  • eBook Packages: EngineeringEngineering (R0)

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