Abstract
A new generation of yaw rate sensor with a linear acceleration sensor, both based on silicon micromachining, is presented. The sensor is designed for mass production and high performance applications like the Vehicle Dynamic Control System VDC. For the yaw rate sensor a combination of surface and bulk micromachining is used. The linear acceleration sensor is build in surface micromachining. Both measuring elements and the ASIC are assembled on a hybrid. This leads to an advantage in design, signal evaluation and packaging. The designs of the measuring elements, the assembly, the interface and the characterization results of the current device are presented.
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© 1998 Springer-Verlag Berlin Heidelberg
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Golderer, W. et al. (1998). Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications. In: Ricken, D.E., Gessner, W. (eds) Advanced Microsystems for Automotive Applications 98. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-39696-4_6
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DOI: https://doi.org/10.1007/978-3-662-39696-4_6
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-38795-5
Online ISBN: 978-3-662-39696-4
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