Abstract
HSG-IMIT is developing a new silicon rate gyroscope of very small size, low cost, and high performance. The device is called MARS-RR, which means Micromachined Angular Rate Sensor with two Rotary oscillation modes. First prototypes, MARS-RR1 yielded random walk and bias stability as low as 0.27 deg/√h and 65 deg/h, respectively. The noise equivalent rate (3 σ) corresponds to a resolution of 0.096 deg/s in a 50 Hz bandwidth.
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References
W. C. Tang, et al., Electrostatic Comb Drive Levitation and Control Method, Journal of Microelectromechanical Systems, Vol. 1, No. 4, December 1992
W. Geiger, et al, New Designs of Micromachined Vibrating Rate Gyroscopes with Decoupled Oscillation Modes, Transducers ’97, pp 1129–1132
M. Illing, Micromachining Foundry Designrules, Version 1.0, Bosch Mikroelektronik
M. Paulsen, Wacker-Silizium Wafer Produktinformation, Wacker-Chemitronic GmbH, D-82633 Burghausen, April 92
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© 1998 Springer-Verlag Berlin Heidelberg
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Geiger, W. et al. (1998). A New Silicon Rate Gyroscope with Decoupled Oscillation Modes. In: Ricken, D.E., Gessner, W. (eds) Advanced Microsystems for Automotive Applications 98. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-39696-4_27
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DOI: https://doi.org/10.1007/978-3-662-39696-4_27
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