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Abstract

The instrument described here is a development of the Materials Analysis Company Model 400 X-ray microprobe analyzer. It incorporates all the X-ray microanalysis capabilities of the earlier instrument, and in addition allows scanned electron images to be formed with up to 1,000 Å resolution.

Copyright information

© Springer-Verlag Berlin Heidelberg 1969

Authors and Affiliations

  • V. G. Macres
    • 1
  • O. Preston
    • 1
  • N. C. Yew
    • 1
  • R. Buchanan
    • 1
  1. 1.Materials Analysis CompanyPalo AltoUSA

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