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Abstract

The energy analysis of electrons is important not only for the study of absorption and inelastic scattering of electrons in thin films, but also for the exact explanation of electron micrographs and diffraction patterns. In some cases, the energy analysis of electron micrographs can be applied to the identification of material of a specimen part of the electron microscopic dimension by taking advantage of the characteristic energy loss spectra.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1969

Authors and Affiliations

  • T. Ichinokawa
    • 1
    • 2
  • H. Tochigi
    • 1
    • 2
  1. 1.Department of Applied PhysicsWaseda UniversityTokyoJapan
  2. 2.Akashi Seisakusho, Ltd.TokyoJapan

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