Vth International Congress on X-Ray Optics and Microanalysis / V. Internationaler Kongreß für Röntgenoptik und Mikroanalyse / Ve Congrès International sur l’Optique des Rayons X et la Microanalyse pp 299-304 | Cite as
Microanalysis by Electron Energy Analysis with a Cylindrical Magnetic Lens
The energy analysis of electrons is important not only for the study of absorption and inelastic scattering of electrons in thin films, but also for the exact explanation of electron micrographs and diffraction patterns. In some cases, the energy analysis of electron micrographs can be applied to the identification of material of a specimen part of the electron microscopic dimension by taking advantage of the characteristic energy loss spectra.
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