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Microanalysis in the Transmission Electron Microscope by Selected Area Electron Spectrometry

  • D. B. Wittry
  • R. P. Ferrier
  • V. E. Cosslett

Abstract

Energy losses of transmitted electrons have been investigated as a basis for microanalysis using a simple homogeneous-field magnetic prism spectrometer below the camera chamber of an AEI EM 6 B. Adequate energy resolution and high efficiency are obtained by using the exit pupil of the electron microscope as an entrance slit for the spectrometer and an area-selecting diaphragm as the aperture stop. Chromatic aberration is minimized by changing the accelerating voltage; phase sensitive demodulation techniques are also used in studies involving inner-shell excitation. Some preliminary results are reported and the factors important in optimizing the signal to background ratio in microanalysis by selected area electron spectrometry are discussed.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1969

Authors and Affiliations

  • D. B. Wittry
    • 1
    • 2
  • R. P. Ferrier
    • 1
  • V. E. Cosslett
    • 1
  1. 1.Cavendish LaboratoryUniversity of CambridgeEngland
  2. 2.Department of Materials ScienceUniversity of Southern CaliforniaCaliforniaUSA

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