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Accuracy of Atomic Number and Absorption Corrections in Electron Probe Microanalysis

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Abstract

The practising probe analyst requires a method for correcting results which is accurate, easy to apply, and applicable to a wide variety of specimens. To achieve generality, it is essential that the procedure should be based on a good physical theory of the X-ray generation-absorptionfluorescence processes. However, on account of the complexity of the electron scattering process, this necessarily contains approximations, and some parameters in the theory are best obtained from an empirical fit to the analysis of specimens of known composition. If a large number of such measurements are made on different specimens under varying conditions, the effect of random experimental errors can be distinguished from systematic trends arising from imperfections in the theory.

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Duncumb, P., Shields-Mason, P.K., da Casa, C. (1969). Accuracy of Atomic Number and Absorption Corrections in Electron Probe Microanalysis. In: Möllenstedt, G., Gaukler, K.H. (eds) Vth International Congress on X-Ray Optics and Microanalysis / V. Internationaler Kongreß für Röntgenoptik und Mikroanalyse / Ve Congrès International sur l’Optique des Rayons X et la Microanalyse. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-24778-5_21

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  • DOI: https://doi.org/10.1007/978-3-662-24778-5_21

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-22845-6

  • Online ISBN: 978-3-662-24778-5

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