When the electron beam of a microprobe strikes the surface of a specimen, considering in this case a single element, one part of the electrons is reflected or back scattered. The other part which enters the specimen can excite X-rays. The kinetic energy of the electrons decreases with greater penetration depths.


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Copyright information

© Springer-Verlag Berlin Heidelberg 1969

Authors and Affiliations

  • E. Preuss
    • 1
  1. 1.KFA-JülichITPJülichDeutschland

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