Vth International Congress on X-Ray Optics and Microanalysis / V. Internationaler Kongreß für Röntgenoptik und Mikroanalyse / Ve Congrès International sur l’Optique des Rayons X et la Microanalyse pp 76-79 | Cite as
Measurements of Backscattered Electron Energy Spectra for Primary Beam Energies of 10 to 30 keV
This work was carried out to examine the effects of beam energy, take-off angle and specimen atomic number on the energy spectra of backscattered electrons. The effect these spectral differences have on the backscattering corrections in microanalysis is also being examined.
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