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Scanning Electron Microscopy pp 365–403Cite as

Elemental Analysis and Imaging with X-Rays

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Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 45))

Abstract

For quantitative x-ray microanalysis, the number of x-ray quanta in characteristic lines produced by the specimen and by a pure element standard or one of known concentration are counted. The concentration of the element in the specimen can be calculated from the ratio of these counts. However, several corrections are necessary since various factors are different for specimen and standard: the backscattering and the stopping power, which depend on atomic number (Z); the x-ray absorption (A); and the fluorescence (F). The ZAF correction programs developed for x-ray microprobes at normal incidence can also be used quantitatively in SEM for normal and tilted specimens. For small particles and films on substrates and for biological specimens, special correction problems have to be taken into account. X-ray fluorescence analysis can be employed in SEM at some sacrifice of spatial resolution.

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  1. Physikalisches Institut, Westfätlische Wilhelms-Univeraität Münster, Domagkstraße 75, D-4400, Münster, Fed. Rep. of Germany

    Professor Dr. Ludwig Reimer

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Reimer, L. (1985). Elemental Analysis and Imaging with X-Rays. In: Scanning Electron Microscopy. Springer Series in Optical Sciences, vol 45. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-13562-4_9

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